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Vol. 127, Issue 4, April 2011, pp.88-101

 

Bullet

 

Modeling and System-level Simulation of Force-balance MEMS Comb Accelerometers

 

Hao CHEN, Limei XU

Institute of Astronautics & Aeronautics

University of Electronic Science and Technology of China

Chengdu, Sichuan 611731, China

Tel.: 028-83205198

E-mail: scuch@uestc.edu.cn

 

 

Received: 10 April 2011   /Accepted: 22 April 2011   /Published: 30 April 2011

 

Abstract: This paper presents a quick system-level modeling and simulation of force-balance MEMS comb accelerometers. The derivation of the system-level model including the sense element and interface electronics is elaborated and the simulation results are obtained from COVENTOR and MATLAB respectively. The force-balance MEMS comb accelerometer, with the size of 1920 m 960 m 50 m, the static capacitance of 2.25 pF, and the inertial mass of 5.47 g, can endure with over load of 2000 g. Through the system-level simulation, the sensitivity is 100 mv/g, the full scale range is   50 g, the nonlinear distortion is smaller than 0.5 % and the system bandwidth is 2.2 kHz.

 

Keywords: Micro-accelerometer; System-level simulation; Closed-loop system; Differential capacitive.

 

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