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Vol. 129, Issue 6, June 2011, pp.33-41





Laser Power Measurement Using Commercial MEMS Pressure Sensor along with PSoC Embedded Read-out

J. Jayapandian and K. Prabakar

Materials Science Group, Indira Gandhi Centre for Atomic Research,

Kalpakkam 603 102, Tamil Nadu, India

E-mail: jjp@igcar.gov.in



Received: 22 May 2011   /Accepted: 20 June 2011   /Published: 30 June 2011

Handbook of Laboaratory Measurements book


Abstract: Solid-state, gas, semiconductor and other types of lasers are extensively employed in industry for producing laser beams used in such wide ranging fields as machining, medicine and communications. In such applications, it is necessary to be able to accurately measure the power of the laser beam that is emitted by the laser. This paper describes a novel design technique which uses the diaphragm of a commercial MEMS pressure sensor as a target surface on which laser beam impinge, transfer heat and causes change in piezo resistance. The measured change in resistance was proportional to the intensity of laser beam in the range of 0 to 300 mW. The ratio metric embedded read-out design using a single chip programmable system on chip (PSoC) has been used to acquire the resistance.


Keywords: Laser power measurement, MEMS pressure sensor, PSoC microcontroller


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