bullet Sensors & Transducers Journal

    (ISSN 1726- 5479)


2008 e-Impact Factor

25 Top Downloaded Articles

Journal Subscription 2011

Editorial Calendar 2011

Submit an Article

Editorial Board

Current Issue

Sensors & Transducers journal's cover

Sensors & Transducers Journal 2010

Sensors & Transducers Journal 2009

Sensors & Transducers Journal 2008

Sensors & Transducers Journal 2007

2000-2002 S&T e-Digest Contents

2003 S&T e-Digest Contents

2004 S&T e-Digest Contents

2005 S&T e-Digest Contents

2006 S&T e-Digest Contents


Best Articles 2010




Vol. 130, Issue 7, July 2011, pp.118-126




An Analytical Method to Determine the Response of a Micro Capacitive Pressure Sensor

1Ashwin Simha, 2S. M. Kulkarni and 3,*S. Meenatchisundaram

1,2 Department of Mechanical Engineering, National Institute of Technology Karnataka, Surathkal

Dakshina Kannada, India

3 Department of Instrumentation and Control Engineering, Manipal Institute of Technology, Manipal

Udupi, India

e-mail: ashwinsimha@gmail.com, smkulk@gmail.com, meenasundar@gmail.com



Received: 25 May 2011   /Accepted: 22 July 2011   /Published: 29 July 2011

Handbook of Laboaratory Measurements book


Abstract: The response of a capacitive pressure sensor is generally represented by a fourth order partial differential equation which is complex to solve and does not possess an exact solution. Several attempts have been made earlier through various techniques such as the Galerkin method, Finite Difference Method etc. In this paper an attempt has been made to develop a simple approximate analytical approach to determine the response of a capacitive pressure sensor whose diaphragm is designed to undergo very small deflections (typically less than 25 % of the thickness). The non-uniform gap between the electrodes is mathematically expressed as a combination of the initial gap between the electrodes (in the undeformed state) and a displacement function in (x, y). The proposed displacement function is then utilized in evaluating the capacitance as a function of the applied pressure. The results obtained from the analytical approach are benchmarked against those obtained from COMSOL Multiphysics®, a popular Finite Element Analysis tool in the MEMS industry. It is observed that the results obtained from COMSOL Multiphysics® and those from the analytical approach are in good agreement with a maximum deviation of about 3.38 %.


Keywords: Non-uniform gap, Simple approximate approach, Displacement function, COMSOL Multiphysics®.


Acrobat reader logo Click <here> or title of paper to download the full pages article (1.03 Kb)



Read  more about Pressure Sensors






1999 - 2011 Copyright ©, International Frequency Sensor Association (IFSA). All Rights Reserved.

Home - News - Links - Archives - Tools - Standardization - Patents - Marketplace - Projects - Wish List - Subscribe - Membership - IFSA Publishing - Submit Press Release - Twitter - Search

 Members Area -Sensors Portal - Voltage-to-Frequency Converters - Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Sensor Jobs - e-Shop - Site Map - Video