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Vol. 131, Issue 8, August 2011, pp.8-20

 

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Coupled Electro-thermal-mechanical and Transient Characteristic for Micro Gas Pressure Sensor Micro-hotplate-based

 

a,*Rencheng Jin, aLisha Meng, aMingliang Shao and bZhenan Tang

aThe Key Laboratory for Micro/Nano Technology and System of Liaoning Province,

Dalian University of Technology, Dalian, 116023, China

bDepartment of Electronic Engineering, Dalian University of Technology, Dalian, 116023, China

*Tel.: (+86)0411-84707713-2194, fax: (+86)0411-84707940

*E-mail: rcjin@dlut.edu.cn

 

 

Received: 18 July 2011   /Accepted: 22 August 2011   /Published: 30 August 2011

 

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Abstract: The electrothermal theoretical analysis of micro-hotplate-based air pressure sensor is carried out and its model is built up, which is based on the classical heat transfer theory and rarefied gas dynamics. According to the heat transfer theory analysis of the micro hotplate (MHP) and the thermal finite element simulation, coupled electro-thermal-mechanical model of micro-hotplate-based air pressure sensor is established. The finite element analysis software ANSYS helps to process thermal analysis for the micro hotplate, and the appropriate width of supporting bridge is chosen. The paper carried out a transient response analysis for the micro hotplate, which showed the changing process of the temperature and deformation of MHP in detail for further study. The research work provided a more feasible analysis method in the theoretical study of micro hotplate.

 

Keywords: Micro gas pressure sensor, Micro hotplate, Coupling analysis, Coupled electro-thermal-mechanical, Transient characteristic

 

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