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Vol. 131, Issue 8, August 2011, pp.101-109

 

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Study of Microstructural Parameters of Screen Printed In2O3 Thick Film Sensors

 

*1Sushma KULKARNI, 2R. Y. BORSE, 3A. V. PATIL

1Department of Physics, S.P.H.Mahila College, Malegaon-Camp- 423105, Dist-Nasik, (M. S.), India

2Thin and Thick film Laboratory, Department of Electronics M. S. G. College,

Malegaon-Camp 423105, Dist- Nasik, (M.S.), India

3Department of Electronics, L.V.H.College, Panchavati, Nasik - 422003 (M.S.), India

*E-mail: sckulkarni12@gmail.com

 

 

Received: 20 May 2011   /Accepted: 22 August 2011   /Published: 30 August 2011

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Abstract: Indium Oxide (In2O3) thick films were prepared on alumina substrate by using standard screen printing technique. These films were dried and fired at temperatures between 650 0C to 950 0C for two hours in air atmosphere. The material characterization was done using X-ray energy dispersive analysis (EDAX), X-ray diffraction (XRD) and a scanning electron microscope (SEM). The deposited films were polycrystalline in nature with a preferred orientation along the (222) plane. Structural parameters such as the crystallite size, texture coefficient, RMS microstrain, dislocation density and stacking fault probability have been studied. The results indicate that reported parameters changes with firing temperature. The crystallite size changes from 26.8 nm to 31 nm with respect to the firing temperature.

 

Keywords: In2O3, Thick films, SEM, XRD, Screen printing

 

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