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Vol. 134, Issue 11, November 2011, pp.56-64




A Humidity Sensor Based on Nb-doped Nanoporous TiO2 Thin Film


Mansoor Anbia, S. E. Moosavi Fard

Research Laboratory of Nanoporous Materials, Faculty of Chemistry,
Iran University of Science and Technology, Farjam Street, Narmak, Tehran 16846, Iran

Tel: +98 21 77240516, fax: +98 21 77491204

E-mail: anbia@iust.ac.ir



Received: 10 November 2011   /Accepted: 21 November 2011   /Published: 29 November 2011

Handbook of Laboaratory Measurements book


Abstract: The humidity sensing properties of the sensor fabricated from Nb-doped nanoporous TiO2 by screen-printing on the alumina substrate with Ag-Pd interdigital electrodes have been investigated. The nanoporous thin film has been prepared by sol-gel technique. The product has been characterized by X-ray diffraction and scanning electron microscopy to analyze the structure and its morphology. It is found that the impedance of this sensor changes more than four orders of magnitude in the relative humidity (RH) range of 1195 % at 25 C. The response and recovery time of the sensor are about 19 and 25 s, respectively, during the RH variation from 11 to 95 %. The sensor shows high humidity sensitivity, rapid response and recovery, prominent stability, good repeatability and narrow hysteresis loop. These results indicate that Nb-doped nanoporous TiO2 thin films have a great potential for humidity sensing applications in room temperature operations.


Keywords: Humidity sensor, Nanoporous TiO2, Thin film, Nb doped


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