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Vol. 134, Issue 11, November 2011, pp.85-94




MEMS Based Ethanol Sensor Using ZnO Nanoblocks, Nanocombs and Nanoflakes as Sensing Layer


a,* H. J. Pandya, b Sudhir Chandra and a A. L. Vyas

a Instrument Design Development Centre, Indian Institute of Technology Delhi, Hauz Khas, New Delhi,110016, India

Tel.: +91-11-26596209, fax: +91-11-26596219,

b Centre for Applied Research in Electronics, Indian Institute of Tecnology Delhi, Hauz Khas, New Delhi, 110016, India

*Tel.: +91-11-26591105, fax: +91-11-26596219

E-mail: hjpele@yahoo.com, alvyas@iddc.iitd.ac.in



Received: 23 August 2011   /Accepted: 21 November 2011   /Published: 29 November 2011

Handbook of Laboaratory Measurements book


Abstract: An ethanol sensor incorporating nanostructures of zinc oxide film on integrated MEMS platform is reported. A salient feature of the sensor is its lower operating temperature, which has been achieved due to the use of nanostructured ZnO material as sensing layer. In addition, a catalyst free synthesis technique has been used to grow the ZnO nanostructures. A suitably designed nickel microheater has been integrated with the sensor. The sensor was tested for various volatile organic compounds (VOCs). The response time of the sensors was studied. The sensors were sensitive to ethanol vapors at operating temperature of 100 C. The sensor prepared using combination of ZnO nanoflakes with nanowires as sensing film showed higher sensitivity and fast response time compared to the sensors prepared using ZnO nanoblocks and nanocombs. The dynamic response of the sensors made using ZnO nanoblocks, nanocombs and combination of nanoflakes and nanowires were studied and compared.


Keywords: MEMS sensor, Ethanol sensor, Thermal evaporation, Zinc films, ZnO nanostructures


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