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Vol. 134, Issue 11, November 2011, pp.155-162




An Investigation of Structural and Electrical Properties of Nano Crystalline SnO2:Cu Thin Films
Deposited by Spray Pyrolysis


1 J. Podder and 2 S. S. Roy

1 Department of Physics, Bangladesh University of Engineering and Technology,

Dhaka-1000, Bangladesh

Tel: +880-2-9665613

2 Department of Physics, Dwarika Paul Mohila Degree College, Sreemongal-3210, Bangladesh

E-mail: jpodder@phy.buet.ac.bd



Received: 5 November 2011   /Accepted: 21 November 2011   /Published: 29 November 2011

Handbook of Laboaratory Measurements book


Abstract: Pure tin oxide (SnO2) and Cu doped SnO2 thin films have been deposited onto glass substrates by a simple spray pyrolysis technique under atmospheric pressure at temperature 350 C. The doping concentration of Cu was varied from 1 to 8 wt. % while all other deposition parameters such as spray rate, carrier air gas pressure, deposition time, and distance between spray nozzle to substrate were kept constant. Surface morphology of the as-deposited thin films has been studied by Scanning Electron Microscopy (SEM). The SEM micrograph of the films shows uniform deposition. The structural properties of the as-deposited and annealed thin films have been studied by XRD and the electrical characterization was performed by Van-der Pauw method. The as-deposited films are found polycrystalline in nature with tetragonal crystal structure. Average grain sizes of pure and Cu doped SnO2 thin film have been obtained in the range of 7.2445 to 6.0699 , which indicates the nanometric size of SnO2 grains developed in the film. The resistivity of SnO2 films was found to decrease initially from 4.5095104 Ωm to 1.1395 104 Ωm for concentration of Cu up to 4 % but it was increased further with increasing of Cu concentrations. The experimental results depict the suitability of this material for using as transparent and conducting window materials in solar cells and gas sensors.


Keywords: Spray pyrolysis, SnO2, Gas sensor materials, XRD, Nanocrystalline


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