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Vol. 135, Issue 12, December 2011, pp.80-89




Modeling of Spring Constant and Pull-in Voltage of T-Shaped Radio Frequency Microelectromechanical (RF-MEMS) Cantilever Switch

Shakti P TRIPATHY and Navneet GUPTA

Department of Electrical and Electronics Engineering, Birla Institute of Technology and Science (BITS), Pilani, Rajasthan, 333031, India

Tel.: +911596515411

E-mail: dr.guptanavneet@gmail.com



Received: 23 August 2011   /Accepted: 16 December 2011   /Published: 28 December 2011

Handbook of Laboaratory Measurements book


Abstract: This paper presents the design and simulation of a low actuation voltage microelectromechanical system (MEMS) switch for high-frequency applications. Low pull-in voltage and low spring constant of the switch were achieved by using T-shape microcantilever of specific dimension. The modelling indicated that increased area of actuation at a distance from the fixed end reduced the pull-in voltage. Increasing the length of the cantilever was also observed to decrease the pull-in voltage to an even greater extent than increasing the actuation area did. It has been observed that switches using this design and actuation mechanism, the minimum pull-in voltage of 5-8 V can be achieved. Finally, both theoretical and simulated data for the dynamic behaviour of the device is presented.


Keywords: Microelectromechanical system (MEMS), Pull-in voltage, Spring constant, Cantilever


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