On-line Magazine 'Sensors & Transducers' (S&T e-Digest)

    (ISSN 1726- 5479)

Vol. 72, Issue 10, October 2006, pp. 740-753

Optimized Design of Microresonators Using Genetic Algorithm

¹G.Uma, ²A. Girija, ³M. Umapathy

^{1, 2, 3} Department of Instrumentation and Control Engineering,

National Institute of Technology, Tiruchirappalli, India-620015

¹E-mail: guma@nitt.edu

³E-mail: umapathy@nitt.edu

Received: 4 July 2006   /Accepted: 18 October 2006   /Published: 23 October 2006

Abstract: This paper represents the optimization of micro resonator design using Genetic Algorithm. Optimized physical layout parameters are generated using genetic algorithm. Optimization evaluates parameter by minimizing active device area, electrostatic drive voltage or a weighted combination of area and drive voltage or by maximizing displacement at resonance. Desired resonant frequency and mode frequency separations are governed by the objective function. Layouts are generated for optimized design parameters using Coventorware. Modal analysis is performed and it is compared with the designed resonant frequency.

Keywords: Microresonators; Genetic Algorithm; Resonant frequency

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