bullet On-line Magazine 'Sensors & Transducers' (S&T e-Digest)

    (ISSN 1726- 5479)

 

25 Top Downloaded Articles

Submit an Article

Editorial Board

Sensors &Transducers Journal's cover

2000-2002 S&T e-Digest Contents

2003 S&T e-Digest Contents

2004 S&T e-Digest Contents

2005 S&T e-Digest Contents

 
   

 

 

Vol. 72, Issue 10, October 2006, pp. 754-760

 

Bullet

 

MEMS Capacitive Thermal Sensor Sensitivity Investigation Using Full Factorial Design Method

 

1Ghader Rezazadeh, 2Shahriar Kouravand, 3Mehdi Mehrban

1, 2, 3 Mech. Eng. Dept. Urmia University, Urmia, IRAN, 1Tel: +98-914-145-1407

1Fax: +98-441-277-7022, 1E-mail: g.rezazadeh@mail.urmia.ac.ir

 

Received: 23 September 2006   /Accepted: 18 October 2006   /Published: 23 October 2006

 

 

Abstract: In this paper a sensitivity of MEMS capacitive thermal sensors based on deflection of a bimetallic cantilever beam was investigated. Using design of experiment method, and applying a 25 factorial design the effect of factors in this sensor was calculated and main factors that affect on sensorís sensitivity were identified. Analysis of variance for the main factors of design and their interactions were studied for their significance.

 

Keywords: MEMS; Bimetallic cantilever; Full factorial design; Sensitivity; Thermal Sensor

 

Acrobat reader logo Click <here> or title of paper to download the full pages article (419 K)

 

 

 

 


1999 - 2006 Copyright ©, International Frequency Sensor Association (IFSA). All Rights Reserved.


Home - News - Links - Archives - Tools - Standardization - Patents - Marketplace - Projects - Wish List - Subscribe - Search - e-Shop - Membership

 Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Sensor Jobs - Site Map