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Vol. 139, No. 4, April 2012, pp. 45-51

 

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Investigation of the Effect of Residual and Axial Stress, on Pull-in Instability of a Fully Clamped Micro-beam under Electrostatic Actuation, Considering Fringing Field Effect

 

1Saber Azizi, 2Mohammad Reza Ghazavi, 3 Ghader Rezazadeh, 4 Farrokh Mobadersani

 1 Mechanical Engineering Department, Tarbiat Modares University, Tehran, Iran

2 Tarbiat Modares University of Tehran, Iran

3 Urmia University, Urmia, Iran

4 Urmia University of Technology

1Tel: +98 914 446 2355

E mail: S.Azizi@modares.ac.ir

 

 

Received: 2 December 2012   /Accepted: 23 April 2012   /Published: 30 April 2012

Digital Sensors and Sensor Sysstems

 

Abstract: In this paper the effect of residual stress due to fabrication process and axial stress due to self stretching, on Pull-in instability of a Clamped-Clamped micro-beam, exposed to electrostatic actuation is investigated. The nonlinear electromechanical integro-differential equation governing the problem is solved using a Finite element code. The problem is solved for various values of residual stresses, and initial gaps. The achieved results are finally compared to that of reported ones.

 

Keywords: Micro beam, Pull in instability, Fringing field effect, clamped-clamped, Residual stress, axial stress

 

 

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