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Vol. 205, Issue 10, October 2016, pp. 53-57




Research on Symmetry of Micromachined Silicon Resonant Accelerometer

1Haipeng Guo, 1 * Libin Huang, 1 Wenxiang Li, 2 Songli Wang

1 School of Instrument Science and Engineering, Southeast University, Nanjing, 210096, China
2 Aviation Key Laboratory of Science and Technology on Inertia, FACRI, Xi’an, 710065, China
* E-mail: 101010566@seu.edu.cn


Received: 27 September 2016 /Accepted: 28 October 2016 /Published: 31 October 2016

Digital Sensors and Sensor Sysstems


Abstract: The Micromachined Silicon Resonant Accelerometer (MSRA) is a micro- accelerometer with potential high accuracy and is one of development focuses of the silicon inertia sensor. The MSRA mostly adopts the differential structure to inhibit the common-mode error. However, the two resonators of the practical MSRA prototype are not fully symmetric, thus reducing the effect of the differential structure inhibiting the common-mode error. Factors influencing symmetry of the MSRA are studied from the aspects of structure and circuit. Following that, a method to cope with the problem of asymmetry of two resonators through adjustment of the value of the DC driving voltage is put forward to improve the performance of the MSRA.


Keywords: Micro-accelerator, Resonant, Symmetry, Differential structure.


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