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Vol. 9, Special Issue, December 2010, pp.96-108



Effect of Annealing Temperature on Gas Sensing Performance of SnO2 Thin Films Prepared by Spray Pyrolysis


1G. E. PATIL, 1D. D. KAJALE, 2S. D. SHINDE, 3R. H. BARI, 4D. N. Chavan, 2V. B. GAIKWAD, 1*G. H. JAIN

1Materials Research Lab., Arts, Commerce and Science College, Nandgaon 423 106, MS, India

2Materials Research Lab., K.T.H.M. College, Nashik 422 005, MS, India

3Department of Physics, GMD Arts, KRN Commerce and MD Science College,

Jamner 424 206, MS, India

4Department of Chemistry, Arts Commerce and Science College, Lasalgaon 422 306, MS, India

*E-mail: gotanjain@rediffmail.com



Received: 27 September 2010   /Accepted: 30 November 2010   /Published: 30 December 2010


Abstract: The effect of variation of annealing temperature on the gas sensing characteristics of SnO2 thin films, which have been prepared by spray pyrolysis on alumina substrate at 350 oC, is investigated systematically for various gases at different operating temperature. The XRD, UV-visible spectroscopy and SEM techniques were employed to establish the structural, optical and morphological characteristics of the materials, resp. The X-ray diffraction results showed an increase in the crystallinity at higher annealing temperature. A high value of sensitivity is obtained for H2S gas at an optimum temperature of 100 oC is improved considerably. A SnO2 gas sensor annealed at 950 oC with sensitivity as high as 24 %, 4 times higher than that of sensor annealed at 550oC, are obtained for 80 ppm of H2S. The degree of crystallinity and grain size calculated from the XRD patterns has been found increasing with annealing temp


Keywords: Spray pyrolysis, SnO2 thin films, Degree of crystallinity, H2S gas sensor


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