Sensors & Transducers Journal

    (ISSN 1726- 5479)

Special Issue, October 2007, pp. 84-92

Micromechanical GaAs Hot Plates for Gas Sensors

¹Jiri JAKOVENKO, ¹Miroslav HUSAK, ²Tibor LALINSKY, ³Milan DRZIK

¹Department of Microelectronics, Czech Technical University in Prague,

Technicka 2, 166 27, Prague 6, Czech Republic

² Institute of Electrical Engineering, Slovak Academy of Sciences, Bratislava, Slovakia

³International Laser Center, Ilkovičova 3, 812 19 Bratislava, Slovakia

E-mail: jakovenk@feld.cvut.cz, http://www.micro.feld.cvut.cz

Received: 17 September 2007   /Accepted: 19 September 2007   /Published: 8 October 2007

Abstract: This paper discusses the design, simulation and fabrication of new Micromachined Thermal Hot Plates (MTHPs) based on GaAs, which were designed for Gas sensors. High sensitivity and low power are expected for present metal oxide Gas sensors, which generally work in high temperature mode (which is essential for chemical reactions to be performed between molecules of the specified gas and the surface of sensing material). Because low power consumption is required, even for operation temperatures in the range of 200 to 500 ^oC, high thermal isolation of these devices are necessary. The problem can be solved by designing free standing micromechanical hot plates. Mechanical stability and a fast thermal response are especially significant parameters that can not be neglected. These characteristics can be achieved with a new concept of GaAs based thermal converter.

Keywords: Thermal hot plate, Thermo-mechanical simulation, MEMS, Gas sensor

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