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Vol. 13, Special Issue, December 2011, pp.10-20

 

Bullet

 

Applications of a Navigation Instrument Based on a Micro-Motor Driven by Photons

 

Jorge VALENZUELA and Samson MIL’SHTEIN

University of Massachusetts Lowell, 1 University Ave. Lowell, MA, 01854, USA

Tel.:1-978-9343310, fax: 1-978-9343027

E-mail: Samson_milshtein@uml.edu

 

 

Received: 29 June 2011   /Accepted: 16 November 2011   /Published: 28 December 2011

Handbook of Laboaratory Measurements book

 

Abstract: We report potential applications of a novel design of a micro-motor driven by light. The design, based on a scale of micro-machines fabrication, takes into consideration the concept of radiation pressure as a method of actuation. The micro-motor of diameter 15 mm is designed to be made in Silicon wafer. To decrease the weight of the rotational part, we designed a hollow structure metalized by Aluminum. To reduce friction, we suggest the use of octadecylphosphonic acid (ODPA) as Aluminium coating and perfluoropolyoxyalkane (Z-DOL) as Silicon coating. The materials selected lower friction by approximately 50 % and increase reflectivity, allowing a better conversion of the radiant energy into movement. Our design targets altimeter and inclinometer as major applications. It is clear that other applications such as measurement of light intensity, identification of wavelength of incident light, measurement of degree of polarization of light and others can be served by this design.

 

Keywords: MEMS, Motor, DRIE, LIGA, Modeling

 

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