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Vol. 13, Special Issue, December 2011, pp.87-97




Simplifying the Design,Analysis, and Layout of a N/MEMS Nanoscale Material Testing Device


1 Richa BANSAL, 2 Jason V. CLARK

1 School of Mechanical Engineering, Purdue University, West Lafayette, IN 47906, USA

Tel.: +91 01412220100

2 School of Mechanical Engineering, Electrical and Computer Engineering,

Purdue University, West Lafayette, IN 47906, USA

Tel.: +1 765 494-3437

E-mail: bansalr10@gmail.com, jvclark@purdue.edu



Received: 29 June 2011   /Accepted: 16 November 2011   /Published: 28 December 2011

Handbook of Laboaratory Measurements book


Abstract: We present the details of our online tool that greatly simplifies the design, analysis, and layout processes for Micro Electro Mechanical Systems (MEMS). Our test case is a M/NEMS nanomaterial-testing device comprised of an electro-thermal actuator, an electrostatic comb drive sensor and a carbon nanotube specimen. The performance of the actuator depends on its design configuration and the mechanical properties of the specimen. Our tool allows users to easily explore its performance within a parameterized design space, optimize the tester for a chosen specimen type, and export corresponding layout arrays in GDS-II format for direct manufacture. We also integrate our parameterized lumped model of a carbon nanotube (CNT) with the MEMS tester for a complete multi-scale representation of a micro/nanosystem. Our results show that our model agrees well with previously reported results and that such an M/NEMS can be explored and laid-out by novices in minutes. Users may create and explore modifications of this device through SugarCube at www.nanoHub.org


Keywords: MEMS, Carbon nanotubes, Nanoscale metrology, Sugar, SugarCube


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