bullet Sensors & Transducers Journal

    (ISSN 1726- 5479)


2008 e-Impact Factor

25 Top Downloaded Articles

Journal Subscription 2012

Editorial Calendar 2012

Submit an Article

Editorial Board

Current Issue

Sensors & Transducers journal's cover

Sensors & Transducers Journal 2011

Sensors & Transducers Journal 2010

Sensors & Transducers Journal 2009

Sensors & Transducers Journal 2008

Sensors & Transducers Journal 2007

2000-2002 S&T e-Digest Contents

2003 S&T e-Digest Contents

2004 S&T e-Digest Contents

2005 S&T e-Digest Contents

2006 S&T e-Digest Contents

Best Articles 2011




Vol. 14-1, Special Issue, March 2012, pp.244-252




A Novel Sensor for VOCs Using Nanostructured ZnO and MEMS Technologies


a H. J. Pandya, b,* Sudhir Chandra and a A. L. Vyas

a Instrument Design Development Centre, Indian Institute of Technology Delhi,

Hauz Khas, New Delhi 110016, India

Tel.: +91-11-26596209, fax: +91-11-26596219

b Centre for Applied Research in Electronics, Indian Institute of Technology Delhi,

Hauz Khas, New Delhi 110016, India

* Tel.: +91-11-26591105, fax: +91-11-26596219,

E-mail: hjpele@yahoo.com, alvyas@iddc.iitd.ac.in, schandra@care.iitd.ernet.in



Received: 15 November 2011   /Accepted: 20 December 2011   /Published: 12 March 2012

Digital Sensors and Sensor Sysstems


Abstract: A sensor for detection of vapors of volatile organic compounds (VOCs) incorporating nanostructured zinc oxide film and silicon micromachining is reported. One of the key features of the sensor is the use of nanostructured ZnO material which has been synthesized using a novel low cost process. Considerable reduction in the operating temperature of the sensor has been achieved due to the use of nanostructured ZnO material as compared to a sensor having ZnO thin film as the sensing layer. The sensor is formed on a micromachined silicon platform thereby reducing the heat loss. This resulted in reduction in power consumption. The sensor has been tested for a variety of VOCs such as: ethanol, iso-propyl alcohol and acetone. The maximum sensitivity of sensor was observed for ethanol vapors.


Keywords: VOC sensor, Zinc oxide films, Nanostructured Zinc oxide, MEMS


Acrobat reader logo Click <here> or title of paper to download the full pages article (1.59 Mb)



Sensors & Transducers journal subscription

only 450 $ US per year:




Read more about Chemical Sensors and Nanosensors





1999 - 2012 Copyright , International Frequency Sensor Association (IFSA). All Rights Reserved.

Home - News - Links - Archives - Tools - Voltage-to-Frequency Converters - Standardization - Patents - Marketplace - Projects - Wish List - e-Shop - Sensor Jobs - Membership - Videos - Publishing - Site Map - Subscribe - Search

 Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Submit Press Release - Submit White Paper - Testimonies - Twitter - Facebook - LinkedIn