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Vol. 14-1, Special Issue, March 2012, pp.244-252

 

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A Novel Sensor for VOCs Using Nanostructured ZnO and MEMS Technologies

 

a H. J. Pandya, b,* Sudhir Chandra and a A. L. Vyas

a Instrument Design Development Centre, Indian Institute of Technology Delhi,

Hauz Khas, New Delhi 110016, India

Tel.: +91-11-26596209, fax: +91-11-26596219

b Centre for Applied Research in Electronics, Indian Institute of Technology Delhi,

Hauz Khas, New Delhi 110016, India

* Tel.: +91-11-26591105, fax: +91-11-26596219,

E-mail: hjpele@yahoo.com, alvyas@iddc.iitd.ac.in, schandra@care.iitd.ernet.in

 

 

Received: 15 November 2011   /Accepted: 20 December 2011   /Published: 12 March 2012

Digital Sensors and Sensor Sysstems

 

Abstract: A sensor for detection of vapors of volatile organic compounds (VOCs) incorporating nanostructured zinc oxide film and silicon micromachining is reported. One of the key features of the sensor is the use of nanostructured ZnO material which has been synthesized using a novel low cost process. Considerable reduction in the operating temperature of the sensor has been achieved due to the use of nanostructured ZnO material as compared to a sensor having ZnO thin film as the sensing layer. The sensor is formed on a micromachined silicon platform thereby reducing the heat loss. This resulted in reduction in power consumption. The sensor has been tested for a variety of VOCs such as: ethanol, iso-propyl alcohol and acetone. The maximum sensitivity of sensor was observed for ethanol vapors.

 

Keywords: VOC sensor, Zinc oxide films, Nanostructured Zinc oxide, MEMS

 

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