Special Issue: Modern Sensing Technologies

Vol. 90, April 2008, pp. 11-26

SGFET as Charge Sensor: Application to Chemical and Biological Species Detection

T. Mohammed-Brahim, A.-C. Salaün, F. Le Bihan

IETR / Groupe Microélectronique, 263, av. Général Leclerc, 35042 Rennes Cedex, France

Tel.: +33 2 23 23 57 77, fax: +33 2 23 23 56 57

E-mail: brahim@univ-rennes1.fr, www.ietr.org

Received: 15 October 2007   /Accepted: 20 Feb 2008   /Published: 15 April 2008

Abstract: A review of the large possibilities of sub-micron gap Suspended-Gate FETs, namely SGFET, to detect chemical and biologic species with high sensitivity, is presented.  Examples of detection of humidity, gas, pH of liquid solutions, DNA (through one mutation of BRCA1 gene that is the main indication of the possibility for a woman to have breast cancer) and proteins (through the transferrin that is the only carrier of iron in blood) are presented to highlight these possibilities. The high sensitivity is explained from the charge distribution inside the sub-micron gap due to the high field effect.

Keywords: Electronic detection, Suspended-gate FET, Sensitivity, Chemical detection, Biologic detection

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