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Special Issue: Modern Sensing Technologies

Vol. 90, April 2008, pp. 221-232

 

 Bullet

MEMS Based Pressure Sensors Linearity and Sensitivity Issues

 

1Jaspreet Singh, 1K. Nagachenchaiah, 2M. M. Nayak

1Semiconductor Laboratory(SCL), Dept. of Space, Punjab, India
2Liquid Propulsion System Centre (LPSC), ISRO, Dept. of Space, Bangalore, India
E-mail: jaspreet@sclchd.co.in, chen@sclchd.co.in,
mmnayak@gmail.com

 

 

 Received: 15 October 2007   /Accepted: 20 February 2008   /Published: 15 April 2008

 

Abstract: This paper describes the various nonlinearities (NL) encountered in the Si-based Piezoresistive pressure sensors. The effect of various factors like diaphragm thickness, diaphragm curvature, position of the piezoresistors etc. is analyzed taking anisotropy into account. Also, the effect of modified bending stiffness due to presence of oxide/nitride used for isolation between metal and diaphragm is studied from linearity point of view.

 

Keywords: Pressure sensor, Sensitivity, Linearity, Piezoresistance, Wheatstone bridge

 

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