Special Issue: Modern Sensing Technologies

Vol. 90, April 2008, pp. 267-275

A Special Vibration Gyroscope

Wang Hong-Wei, Chee Chen-Jie, Teng Gong-Qing, Jiang Shi-Yu

School of Science, Beijing Information Science and Technology University

Beijing, China

E-mail: drhwh@biti.edu.cn

 Received: 15 October 2007   /Accepted: 20 February 2008   /Published: 15 April 2008

Abstract: A novel silicon micro-machined gyroscope which is driven by the rotating carrier’s angular velocity is introduced. The principle of structure is analyzed. The mathematic module is also established. Process of making the vibration silicon modules is given and the manufacturing of “Sandwiches” sensor is showed. The gyroscope has been tested, the result have certificated that the principle of the gyroscope is correct.

Keywords: Vibration, Gyroscope

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