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MEMS: From Micro Devices to Wireless Systems

Vol. 7, Special Issue, October 2009, pp.34-46





Nanochip: a MEMS-Based Ultra-High Data Density Memory Device


1Nickolai BELOV, 1Donald ADAMS, 1Peter ASCANIO, 2Tsung-Kuan CHOU,
2John HECK,
1Byong KIM, 1Gordon KNIGHT, 2Qing MA, 2Valluri RAO,
1Jong-Seung PARK, 1Robert STARK,

1 Nanochip Inc., 48041 Fremont Blvd., 94538. USA

2 Intel Corporation, 2200 Mission Blvd., Santa Clara, 95054, USA

E-mail: nickolai_belov@sbcglobal.net



Received: 28 August 2009   /Accepted: 28 September 2009   /Published: 12 October 2009


Abstract: The paper provides an overview of successful development of MEMS micro-mover with large range of motion and an array of cantilevers with sharp tips (read-write heads) for a probe storage device. Approaches used for integration of memory material into the MEMS process and integration of MEMS cantilever process with CMOS are briefly discussed.


Keywords: Probe storage, CMOS-MEMS integration, Micro-mover, Cantilevers, Electromagnetic actuator, Electrostatic actuator


Acrobat reader logo Click <here> or title of paper to download the full pages article (1.02 Mb)





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