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MEMS: From Micro Devices to Wireless Systems

Vol. 7, Special Issue, October 2009, pp.47-55





Vertically Aligned Carbon Nanotube Array (VANTA) Biosensor for MEMS Lab-on-a-Chip

1Luke JOSEPH, 1Thomas HASLING  and 2David GARMIRE

1Oceanit, 828 Fort Street Mall, Honolulu, HI, 96813, USA

Tel.: 808-954-4130, 808-954-4211

2University of Hawaii, 2540 Dole Street, Honolulu, HI, 96822, USA

Tel.: 808-956-7406

E-mail: ljoseph@oceanit.com, garmire@hawaii.edu



Received: 28 August 2009   /Accepted: 28 September 2009   /Published: 12 October 2009


Abstract: We describe the fabrication, functionalization and characterization of vertically aligned carbon nanotube arrays (VANTAs) for biological sensor applications. This structure is created using a standard MEMS process and chemical vapor deposition (CVD) multi-walled carbon nanotube (MWNT) post-processing. The device is well suited for full integration into microfluidic lab-on-a-chip solutions. Included is a spectroscopic characterization of the galvanostatic impedance of the device, as well as scanning electron microscopy (SEM) images of the pre- and post- functionalized device. Interferometric 3D profiling and X-ray spectroscopy were also used to check process assumptions. The work presented validates that this approach is an ideal candidate for low-cost, high-throughput manufacturing of biochemical sensors. Unlike previously published work [1, 2] using SWNT, the use of MWNT arrays allows functionalization over the entirety of the nanotubes. This approach maintains low baseline impedance and increases the surface area leveraging inherent benefits of the VANTA.


Keywords: Lab-on-a-chip, Vertically aligned carbon nanotube array (VANTA), Biosensor, Bio MEMS


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