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MEMS: From Micro Devices to Wireless Systems

Vol. 7, Special Issue, October 2009, pp.56-62





Development and Test of a Contactless Position and Angular Sensor Device for the Application in Synchronous Micro Motors



Institute for Microtechnology, Technische Universität Braunschweig,

Alte Salzdahlumerstr. 203, 38124 Braunschweig, Germany

Tel.: +49-531-391-9761, fax: +49-531-391-9751

E-mail: a.waldschik@tu-bs.de



Received: 28 August 2009   /Accepted: 28 September 2009   /Published: 12 October 2009


Abstract: In this work, we present a contactless micro position and angular sensor system which consists of fixed commercial magnetic sensor elements, such as hall sensors and a movable part with integrated micro structured polymer magnets. This system serves particularly for linear and rotatory synchronous micro motors which we have developed and successfully tested. In order to achieve high precision and control of these motors an integration of the special micro position and angular sensors is pursued to increase the resolution and accuracy of the devices.


Keywords: Synchronous micro motors, Micro coils, UV depth lithography, Polymer magnets, Position sensor


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