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MEMS: From Micro Devices to Wireless Systems

Vol. 7, Special Issue, October 2009, pp.78-87





Analysis of an Electrostatic MEMS Squeeze-film Drop Ejector


Edward P. Furlani

Eastman Kodak Research Laboratories

1999 Lake Avenue, Rochester, New York 14650-2216, USA

Tel.: 1-585-588-0034, fax: 1-585-588-5967

E-mail: Edward.Furlani@Kodak.com



Received: 28 August 2009   /Accepted: 28 September 2009   /Published: 12 October 2009


Abstract: We present an analysis of an electrostatic drop-on-demand MEMS fluid ejector. The ejector consists of a microfluidic chamber with a piston that is suspended a few microns beneath a nozzle plate. A drop is ejected when a voltage is applied between the orifice plate and the piston. This produces an electrostatic force that moves the piston towards the nozzle. The moving piston generates a squeeze-film pressure distribution that causes drop ejection. We discuss the operating physics of the ejector and present a lumped-element model for predicting its performance. We calibrate the model using coupled structural-fluidic CFD analysis.


Keywords: MEMS inkjet, Microdispensing, Drop-on-demand, Squeeze film drop ejector


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