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MEMS: From Micro Devices to Wireless Systems

Vol. 7, Special Issue, October 2009, pp.101-115





An Online Tool for Simulating Electro-Thermo-Mechanical Flexures Using Distributed and Lumped Analyses


Fengyuan Li and Jason Vaughn Clark

Purdue University, 1205 W. State St., West Lafayette, IN, 47906, USA

Tel.: +1-765-494-3437, fax: +1-765-494-2706

E-mail: li200@purdue.edu, jvclark@purdue.edu



Received: 28 August 2009   /Accepted: 28 September 2009   /Published: 12 October 2009


Abstract: We present an online tool that combines distributed and lumped analyses to simulate a microscale electro-thermo-mechanical actuator. Users may configure and run simulations over the web at nanoHUB.org with remote computation. Compared to pure distributed analysis, our hybrid analysis is nearly as accurate, within 0.5 %. Our tool uses distributed analysis to simulate the electro-thermal domain, and then uses the average temperature with lumped analysis to simulate the thermo-mechanical domain. Our tool compares favorably to experiment when considering the uncertainties in geometries and material properties. Last, we present our tool’s web interface.


Keywords: Online tool, Electro-thermo-mechanical, Modeling, Simulation, Thermal actuator


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