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MEMS: From Micro Devices to Wireless Systems

Vol. 7, Special Issue, October 2009, pp.160-169

 

 

Bullet

 

Micro Tools with Pneumatic Actuators for Desktop Factories

 

Björn HOXHOLD and Stephanus BÜTTGENBACH

Institute for Microtechnology

Technische Universität Braunschweig, Alte Salzdahlumer Str. 203, 38124 Braunschweig, Germany

Tel.: + 49 531 391 9745, fax: + 49 531 391 9751

E-mail: b.hoxhold@tu-bs.de

 

 

Received: 28 August 2009   /Accepted: 28 September 2009   /Published: 12 October 2009

 

Abstract: This paper presents the design, the simulation and the fabrication process of two novel pneumatically driven auxiliary micro tools that can be used to improve and to speed up assembling processes in desktop factories. The described micro systems are designed to function as centrifugal feeders for small glass balls or active clamping devices with small external dimensions. They are able to deliver more than six balls per second on demand to a gripper and align and clamp single chips in a fixed position.

 

Keywords: Pneumatic micro actuator, Piston, Micro tool, Centrifugal feeder, Clamping tool, Desktop factory

 

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