Fem modelling of an electro-optical micro-shutter
Pages 1-7
P. Roux, E. Woirgard, M. Pizzi, O. De Martiis and V. Koniachkine
Abstract
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Development and analysis of the vertical capacitive accelerometer
Pages 8-18
Innam Lee, Gil Ho Yoon, Jungyul Park, Seonho Seok, Kukjin Chun and Kyo-Il Lee
Abstract
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Nanoliter segment formation in micro fluid devices for chemical and
biological micro serial flow processes in dependence on flow rate and
viscosity
Pages 19-27
J.M. Köhler and T. Kirner
Abstract
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Performance and package effect of a novel piezoresistive pressure sensor fabricated by front-side etching technology
Pages 28-37
Chih-Tang Peng, Ji-Cheng Lin, Chun-Te Lin and Kuo-Ning Chiang
Abstract
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An analytical design methodology for microelectromechanical (MEM) filters
Pages 38-47
Yasar Gurbuz, Mustafa Parlak, Thomas F. Bechteler and Ayhan Bozkurt
Abstract
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Dynamic characterization of a thermocouple in a fluid crossflow
Pages 48-56
Cherif Ould Lahoucine and Abdallah Khellaf
Abstract
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Micromechanical tunable optical filters: general design rules for wavelengths from
near-IR up to 10 μm
Pages 57-62
Carlos F.R. Mateus, Michael C.Y. Huang and Connie J. Chang-Hasnain
Abstract
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Enhanced hydrogen-sensing characteristics of MISiC Schottky-diode hydrogen sensor by trichloroethylene oxidation
Pages 63-67
W.M. Tang, P.T. Lai, J.P. Xu and C.L. Chan
Abstract
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Temperature-controlled fiber Bragg grating dynamic strain detection system
Pages 68-74
Xiao-Dong Wu, Cornelia Schmidt-Hattenberger, Kay Krüger and Jun Chen
Abstract
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The influence of noise on output of Ring Laser Gyroscope
Pages 75-83
Wang Kedong, Yan Lei and Gu Qitai
Abstract
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A compact fibre-based fluorescence sensor
Pages 84-89
Mohammad Ahmad, Kuang-Po Chang, T.A. King and Larry L. Hench
Abstract
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Finite element analysis of interference for the laterally coupled quartz crystal microbalances
Pages 90-99
F. Lu, H.P. Lee, P. Lu and S.P. Lim
Abstract
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Linear μ-bending method for the measurement of the residual stress of surface-micromachined MEMS
Jong-Hoon Kim, Jeong-Gil Kim, Soon-Chang Yeon, Young-Keun Chang, Jun-Hee Hahn, Ho-Young Lee and Yong Hyup Kim
Abstract
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Design of a capacitive-sensor signal processing system with high accuracy and short conversion time
Pages 113-119
An Sang Hou and Susan Xiao-Ping Su
Abstract
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Ferroelectric active sensors
Pages 120-127
Lionel Cima and Denis Remiens
Abstract
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A needle temperature microsensor for in vivo and real-time measurement of the temperature in acupoints
Pages 128-132
Renfa Cui, Jianhua Liu, Wentao Ma, Jiabing Hu, Xiaodong Zhou, Hongyi Li and Jiming Hu
Abstract
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Magnetic sensor response dependence on hysteresis effects
Pages 133-137
D.M. Kepaptsoglou, A. Ktena and E. Hristoforou
Abstract
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Infrared integrated optical evanescent field sensor for gas analysis: Part I: System design
Pages 138-149
Ralf Siebert and Jörg Müller
Abstract
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Erratum to "Accurate system-level damping model for highly perforated
micromechanical devices" [Sens. Acutators A 111 (2004) 222–228]
Page 150
Gabriele Schrag and Gerhard Wachutka
Abstract
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Development of hydraulic linear actuator using thin film SMA
Pages 151-156
Daniel D. Shin, Kotekar P. Mohanchandra and Gregory P. Carman
Abstract
|
Study of the effect of solvent induced swelling on the resistivity of
butadiene based elastomers filled with carbon particles: Part I.
Elucidating second order effects
Pages 157-168
Antonio Carrillo, Ignacio R. Martín-Domínguez, Daniel Glossman and Alfredo Márquez
Abstract
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Polycrystalline 3C-SiC thin films deposited by dual precursor LPCVD for MEMS applications
Pages 169-176
Xiao-An Fu, Jeremy L. Dunning, Christian A. Zorman and Mehran Mehregany
Abstract
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Nonlinear compensation of active electrostatic bearings supporting a spherical rotor
Pages 177-186
Fengtian Han, Zhongyu Gao, Dongmei Li and Yongliang Wang
Abstract
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Analysis of power supply interference effects on quasi-digital sensors
Pages 187-195
Ferran Reverter, Manel Gasulla and Ramon Pallŕs-Areny
Abstract
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Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane
Pages 196-205
R.M. Tiggelaar, P. van Male, J.W. Berenschot, J.G.E. Gardeniers, R.E.
Oosterbroek, M.H.J.M. de Croon, J.C. Schouten, A. van den Berg and M.C.
Elwenspoek
Abstract
|
Improvement of isolation for MEMS capacitive switch via membrane planarization
Pages 206-213
A.B. Yu, A.Q. Liu, Q.X. Zhang, A. Alphones, L. Zhu and A.P. Shacklock
Abstract
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Design and evaluation of linear ultrasonic motors for a cardiac compression assist device
Pages 214-220
Yang Ming, Zhu Meiling, Robert C. Richardson, Martin C. Levesley, Peter G. Walker and Kevin Watterson
Abstract
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PZN-PZT flextensional actuator by co-extrusion process
Pages 221-227
Chang-Bun Yoon, Sung-Mi Lee, Seung-Ho Lee and Hyoun-Ee Kim
Abstract
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Measurement for fracture toughness of single crystal silicon film with tensile test
Pages 229-235
Xueping Li, Takashi Kasai, Shigeki Nakao, Hiroshi Tanaka, Taeko Ando, Mitsuhiro Shikida and Kazuo Sato
Abstract
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Actuation by electrostatic repulsion by nonvolatile charge injection
Pages 236-244
Zengtao Liu, Myongseob Kim, Nick Yu-Min Shen and Edwin C. Kan
Abstract
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Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching
Pages 245-253
C. M. Waits, B. Morgan, M. Kastantin and R. Ghodssi
Abstract
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Modeling hysteresis using hybrid method of continuous transformation and neural networks
Pages 254-262
Zhao Tong, Yonghong Tan and Xianwen Zeng
Abstract
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Effects of mechanical agitation and surfactant additive on silicon anisotropic etching in alkaline KOH solution
Pages 263-270
Chii-Rong Yang, Po-Ying Chen, Yuang-Cherng Chiou and Rong-Tsong Lee
Abstract
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Effects of various ion-typed surfactants on silicon anisotropic etching properties in KOH and TMAH solutions
Pages 271-281
Chii-Rong Yang, Po-Ying Chen, Cheng-Hao Yang, Yuang-Cherng Chiou and Rong-Tsong Lee
Abstract
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Journal : SENSORS AND ACTUATORS A: PHYSICAL