Suspended-Gate-
and Lundstrom-FET integrated on a CMOS-chip
Pages 2-6
Ch. Wilbertz, H.-P. Frerichs, I. Freund and M. Lehmann
Abstract |
Transepidermal
water loss sensor based on fast dew point hygrometer
Pages 7-11
R. Jachowicz, J. Weremczuk and G. Tarapata
Abstract |
| Thermal
analysis of silicon carbide based micro hotplates for metal oxide gas
sensors
Pages 12-17
G. Wiche, A. Berns, H. Steffes and E. Obermeier
Abstract
|
On
low cost inclination sensors made from selectively metallized polymer
Pages 18-22
D. Benz, T. Botzelmann, H. Kück and D. Warkentin
Abstract |
Si-piezoresistive
microcantilevers for highly integrated parallel force detection
applications
Pages 23-29
Daisuke Saya, Pascal Belaubre, Fabrice Mathieu, Denis Lagrange,
Jean-Bernard Pourciel and Christian Bergaud
Abstract |
Flexible
wireless pressure sensor module
Pages 30-35
Kyu-Ho Shin, Chang-Ryoul Moon, Tae-Hee Lee, Chang-Hyun Lim and Yong-Jun
Kim
Abstract |
A
new SOI monolithic capacitive sensor for absolute and differential
pressure measurements
Pages 36-43
P.D. Dimitropoulos, C. Kachris, D.P. Karampatzakis and G.I. Stamoulis
Abstract |
A
micromachined nanoindentation force sensor
Pages 44-49
Alexandra Nafari, Andrey Danilov, Henrik Rödjegĺrd, Peter Enoksson and
Hĺkan Olin
Abstract |
A
monolithic three-axis SOI-accelerometer with uniform sensitivity
Pages 50-53
Henrik Rödjegĺrd, Christer Johansson, Peter Enoksson and Gert
Andersson
Abstract |
A
radically new dynamic response capability for Coriolis flow meters
Pages 54-62
C. Clark, R. Cheesewright, S. Wang, M. Henry, Mayela Zamora and M. Tombs
Abstract |
A
spectral vibration detection system based on tunable micromechanical
resonators
Pages 63-72
D. Scheibner, J. Mehner, D. Reuter, T. Gessner and W. Dötzel
Abstract |
The
effect of SU-8 patterned surfaces on the response of the quartz crystal
microbalance
Pages 73-76
C.R. Evans, G. McHale, N.J. Shirtcliffe, S.M. Stanley and M.I. Newton
Abstract |
A
SU-8 fluidic microsystem for biological fluids analysis
Pages 77-81
J.C. Ribeiro, G. Minas, P. Turmezei, R.F. Wolffenbuttel and J.H. Correia
Abstract |
Evaluation
of a vibrating micromachined cantilever sensor for measuring the
viscosity of complex organic liquids
Pages 82-86
A. Agoston, F. Keplinger and B. Jakoby
Abstract |
Characterization
of uncooled bolometer with vanadium tungsten oxide infrared active layer
Pages 87-91
Nguyen Chi-Anh, Hyun-Joon Shin, KunTae Kim, Yong-Hee Han and Sung Moon
Abstract |
Nanometer
scale measurement of wear rate and vibrations by fiber-optic white light
interferometry
Pages 92-98
Z. Djinovic, M. Tomic and A. Vujanic
Abstract |
Thermo-mechanical
characterization of micromachined GaAs-based thermal converter using
contactless optical methods
Pages 99-105
T. Lalinský, M. Držík, J. Chlpík, M. Krnáč, Š. Haščík,
Ž. Mozolová and I. Kostič
Abstract |
Improvements
in MEMS gyroscope production as a result of using in situ, aligned,
current-limited anodic bonding
Pages 106-110
Tony Rogers, Nick Aitken, Kevin Stribley and James Boyd
Abstract |
SU-8
cantilever sensor system with integrated readout
Pages 111-115
A. Johansson, M. Calleja, P.A. Rasmussen and A. Boisen
Abstract |
High
sensitivity linear position sensor developed using granular Ag–Co
giant magnetoresistances
Pages 116-121
S. Arana, N. Arana, F.J. Gracia and E. Castańo
Abstract |
AMR
navigation systems and methods of their calibration
Pages 122-128
J. Včelák, P. Ripka, J. Kubík, A. Platil and P. Kašpar
Abstract |
Image
compression in video radio transmission for capsule endoscopy
Pages 129-136
D. Turgis and R. Puers
Abstract |
Force
calibration of stylus instruments using silicon microcantilevers
Pages 137-145
Erwin Peiner and Lutz Doering
Abstract |
A
method to characterize the deformation of an IPMC sensing membrane
Pages 146-154
Claudia Bonomo, Luigi Fortuna, Pietro Giannone and Salvatore Graziani
Abstract |
An
autonomous bladder pressure monitoring system
Pages 155-161
J. Coosemans and R. Puers
Abstract |
Thick-film
force and slip sensors for a prosthetic hand
Pages 162-171
A. Cranny, D.P.J. Cotton, P.H. Chappell, S.P. Beeby and N.M. White
Abstract |
Production
processes for a flexible retina implant (Eurosensors XVIII, Session
C6.6)
Pages 172-178
Kaspar Hungar, Michael Görtz, Evelina Slavcheva, Gerd Spanier,
Christopher Weidig and Wilfried Mokwa
Abstract |
Electric
field sensor using electrostatic force deflection of a micro-spring
supported membrane
Pages 179-184
A. Roncin, C. Shafai and D.R. Swatek
Abstract |
A
method for cross-sensitivity and pull-in voltage measurement of MEMS
two-axis accelerometers
Pages 185-193
P. Bruschi, A. Nannini, D. Paci and F. Pieri
Abstract |
Gamma
radiation sensing properties of TiO2, ZnO, CuO and CdO thick
film pn-junctions
Pages 194-198
K. Arshak, J. Corcoran and O. Korostynska
Abstract |
Metal-diamond-metal
planar structures for off-angle UV beam positioning with high lateral
resolution
Pages 199-203
G. Mazzeo, G. Prestopino, G. Conte and S. Salvatori
Abstract |
One-directional
position-sensitive force transducer based on EMFi
Pages 204-209
Grigori Evreinov and Roope Raisamo
Abstract |
A
double heater integrated gas flow sensor with thermal feedback
Pages 210-215
Paolo Bruschi, Alessandro Diligenti, Dino Navarrini and Massimo Piotto
Abstract |
A
high accuracy magnetostrictive linear position sensor
Pages 216-223
Fernando Seco, José Miguel Martín, Antonio Ramón Jiménez and
Leopoldo Calderón
Abstract |
Precise
localisation of archaeological findings with a new ultrasonic 3D
positioning sensor
Pages 224-233
A.R. Jiménez and F. Seco
Abstract |
Capacitive
pressure sensor in post-processing on LTCC substrates
Pages 234-239
M.G.H. Meijerink, E. Nieuwkoop, E.P. Veninga, M.H.H. Meuwissen and
M.W.W.J. Tijdink
Abstract |
A
non-invasive capacitive sensor strip for aerodynamic pressure
measurement
Pages 240-248
M. Zagnoni, A. Golfarelli, S. Callegari, A. Talamelli, V. Bonora, E.
Sangiorgi and M. Tartagni
Abstract |
Characterization
of a novel hybrid silicon three-axial force sensor
Pages 249-257
P. Valdastri, S. Roccella, L. Beccai, E. Cattin, A. Menciassi, M.C.
Carrozza and P. Dario
Abstract |
Silicon
resonant accelerometer with electronic compensation of input-output
cross-talk
Pages 258-266
V. Ferrari, A. Ghisla, D. Marioli and A. Taroni
Abstract |
High
sensitivity Love-mode liquid density sensors
Pages 267-273
A.C. Turton, D. Bhattacharyya and D. Wood
Abstract |
A
novel microacoustic viscosity sensor providing integrated sample
temperature control
Pages 274-280
B. Jakoby, F.P. Klinger and P. Svasek
Abstract |
Tunable
response nano-mechanical beam resonator
Pages 281-284
Thomas Kemp and Michael Ward
Abstract |
Microfabrication
of sensors with magnetic resonating elements for further application in
molecular probe chemistry
Pages 285-289
Luminita Grigore, Graham Ensell and Alan Evans
Abstract |
Magnetoelastic
sensor application in civil buildings monitoring
Pages 290-295
G. Ausanio, A.C. Barone, C. Hison, V. Iannotti, G. Mannara and L.
Lanotte
Abstract |
Bipolar
magnetic microsensor for longitudinal and transversal magnetic fields
Pages 296-302
Marioara Avram, Ciprian Iliescu, Otilia Neagoe, Corneliu Voitincu and
Cecilia Codreanu
Abstract |
Wattmeter
with AMR sensor
Pages 303-307
Michal Vopálenský, Antonín Platil and Petr Kašpar
Abstract |
SOS
and CMOS differential micromagnetodiodes with electrically controlled
sensitivity
Pages 308-312
Ch.S. Roumenin, S.V. Lozanova and D. Nikolov
Abstract |
End-fire
coupling of a SU-8 waveguide to a silicon mesa photodiode: Integrability
in an optical analysis microsystem
Pages 313-318
P. de la Fuente, J.A. Etxeberria, J. Berganzo, J.M. Ruano-López, M.T.
Arroyo, E. Castańo and F.J. Gracia
Abstract |
Silicon
microneedle electrode array with temperature monitoring for
electroporation
Pages 319-325
N. Wilke, C. Hibert, J. O’Brien and A. Morrissey
Abstract |
Image
and color recognition using amorphous silicon p–i–n photodiodes
Pages 326-330
Paula Louro, Manuela Vieira, Alessandro Fantoni, Miguel Fernandes, C.
Nunes de Carvalho and G. Lavareda
Abstract |
A
two terminal optical signal and image processing p–i–n/p–i–n
image and colour sensor
Pages 331-336
M. Vieira, M. Fernandes, P. Louro, A. Fantoni, G. Lavareda, C. Nunes de
Carvalho and Y. Vygranenko
Abstract |
Distributed
fiber-optic frequency-domain Brillouin sensing
Pages 337-342
Romeo Bernini, Aldo Minardo and Luigi Zeni
Abstract |
Enhanced
short wavelength response in laser-scanned-photodiode image sensor using
an a-SiC:H/a-Si:H tandem structure
Pages 343-348
A. Fantoni, P. Louro, M. Fernandes, M. Vieira, G. Lavareda and C. Nunes
De Carvalho
Abstract |
Non-contact
detection of magnetoelastic bilayer position sensors
Pages 349-353
J. Kosel, H. Pfützner, L. Mehnen, E. Kaniusas, T. Meydan, M. Vázquez,
M. Rohn, A.M. Merlo and B. Marquardt
Abstract |
Highly
sensitive thermopile heat power sensor for micro-fluid calorimetry of
biochemical processes
Pages 354-359
V. Baier, R. Födisch, A. Ihring, E. Kessler, J. Lerchner, G. Wolf, J.M.
Köhler, M. Nietzsch and M. Krügel
Abstract |
Influence
of electromagnetic interferences on the mass sensitivity of Love mode
surface acoustic wave sensors
Pages 360-369
Laurent A. Francis, Jean-Michel Friedt and Patrick Bertrand
Abstract |
A
novel piezoresistive microprobe for atomic and lateral force microscopy
Pages 370-378
Teodor Gotszalk, P.B. Grabiec and I.W. Rangelow
Abstract |
A
new design and manufacturing process for embedded Lamb waves
interdigital transducers based on piezopolymer film
Pages 379-387
Filippo Bellan, Andrea Bulletti, Lorenzo Capineri, Leonardo Masotti,
Goksen G. Yaralioglu, F. Levent Degertekin, B.T. Khuri-Yakub, Francesco
Guasti and Edgardo Rosi
Abstract |
Piezoresistance
of silicon and strained Si0.9Ge0.1
Pages 388-396
J. Richter, O. Hansen, A. Nylandsted Larsen, J. Lundsgaard Hansen, G.F.
Eriksen and E.V. Thomsen
Abstract |
Sensing
the thermal conductivity of deteriorated mineral oils using a hot-film
microsensor
Pages 397-402
J. Kuntner, R. Chabicovsky and B. Jakoby
Abstract |
Fabrication
of high temperature surface acoustic wave devices for sensor
applications
Pages 403-407
M.N. Hamidon, V. Skarda, N.M. White, F. Krispel, P. Krempl, M. Binhack
and W. Buff
Abstract |
Development
of temperature sensitive glassware for monitoring temperatures in harsh
industrial environments
Pages 408-417
M. McSherry, E. Lewis and C. Fitzpatrick
Abstract |
In-use
calibration of body-mounted gyroscopes for applications in gait analysis
Pages 418-422
Sergio Scapellato, Filippo Cavallo, Chiara Martelloni and Angelo M.
Sabatini
Abstract |
A
portable multi-sensor data-logger for medical surveillance in harsh
environments
Pages 423-429
Bart Hermans and Robert Puers
Abstract |
Application
of fluxgate excitation circuit with saturable inductor to magnetic
sensing
Pages 430-437
M.C. Duffy, S.C. Tang and P. Ripka
Abstract |
A
novel magneto-optic ferrofluid material for sensor applications
Pages 438-443
Luis Martinez, Franjo Cecelja and Ryszard Rakowski
Abstract |
Thermal
and thermoelastic dynamic analysis with finite element analysis,
application to photothermal and thermoelastic microscopies
Pages 444-452
Bruno Cavallier, Sylvain Ballandras, Bernard Cretin and Pascal Vairac
Abstract |
Fabrication
of a peristaltic PDMS micropump
Pages 453-458
Ok Chan Jeong, Sin Wook Park, Sang Sik Yang and James Jungho Pak
Abstract |
Miniaturized
Fourier Transform Spectrometer for the near infrared wavelength regime
incorporating an electromagnetic linear actuator
Pages 459-467
Ulrike Wallrabe, Christian Solf, Jürgen Mohr and Jan G. Korvink
Abstract |
3D
free space thermally actuated micromirror device
Pages 468-475
Janak Singh, Terence Gan, Ajay Agarwal, Mohanraj and Saxon Liw
Abstract |
A
dynamically driven micro mirror array as the encoding mask in a Hadamard
transform spectrometer (HTS)
Pages 476-482
Marian Hanf, Ramon Hahn, Wolfram Dötzel and Thomas Gessner
Abstract |
Resonant
micro-mirror excited by a thin-film piezoelectric actuator for fast
optical beam scanning
Pages 483-489
F. Filhol, E. Defa˙, C. Divoux, C. Zinck and M.-T. Delaye
Abstract |
Electroplated
Ni microcantilever probe with electrostatic actuation
Pages 490-496
Toshihiro Itoh, Shingo Kawamura, Kenichi Kataoka and Tadatomo Suga
Abstract |
Porous
silicon based orientation independent, self-priming micro direct ethanol
fuel cell
Pages 497-504
Shyam Aravamudhan, Abdur Rub Abdur Rahman and Shekhar Bhansali
Abstract |
Symmetric
toggle switch—a new type of rf MEMS switch for telecommunication
applications: Design and fabrication
Pages 505-514
Kamaljit Rangra, Benno Margesin, Leandro Lorenzelli, Flavio Giacomozzi,
Cristian Collini, Mario Zen, Giovanni Soncini, Laura del Tin and Roberto
Gaddi
Abstract |
A
simple lumped electrical model for an RF MEMS switch considering lossy
substrate effects
Pages 515-521
Giuseppe Cusmai, Marco Mazzini, Paolo Rossi, Chantal Combi, Benedetto
Vigna and Francesco Svelto
Abstract |
Inductive
powering of a freely moving system
Pages 522-530
Bert Lenaerts and Robert Puers
Abstract |
Thermal
actuator with optimized heater for liquid drop ejectors
Pages 531-539
Antonio Cabal, David S. Ross, John A. Lebens and David P. Trauernicht
Abstract |
Simulation
of shaped comb drive as a stepped actuator for microtweezers application
Pages 540-546
Isabelle P.F. Harouche and C. Shafai
Abstract |
A
novel hydraulic microactuator sealed by surface tension
Pages 547-554
Michaël De Volder, Jan Peirs, Dominiek Reynaerts, Johan Coosemans,
Robert Puers, Olivier Smal and Benoit Raucent
Abstract |
Empirical
and theoretical characterisation of electrostatically driven MEMS
structures with stress gradients
Pages 555-562
J. De Coster, H.A.C. Tilmans, J.M.J. den Toonder, J.T.M. van Beek,
Th.G.S.M. Rijks, P.G. Steeneken and R. Puers
Abstract |
A
new latched 2 × 2 optical switch using bi-directional movable
electrothermal H-beam actuators
Pages 563-569
Wen-Chih Chen, Chengkuo Lee, Chia-Yu Wu and Weileun Fang
Abstract |
Fabrication
of vertical digital silicon optical micromirrors on suspended electrode
for guided-wave optical switching applications
Pages 570-583
R. Guerre, C. Hibert, Y. Burri, Ph. Flückiger and Ph. Renaud
Abstract |
Mirror
electrostatic actuation of a medium-infrared tuneable Fabry-Perot
interferometer based on a surface micromachining process
Pages 584-589
N. Sabaté, R. Rubio, C. Calaza, J. Santander, L. Fonseca, I. Grŕcia,
C. Cané, M. Moreno and S. Marco
Abstract |
Piezoelectric
actuation of microbridges using AlN
Pages 590-595
J. Olivares, E. Iborra, M. Clement, L. Vergara, J. Sangrador and A.
Sanz-Hervás
Abstract |
Monolithic-integrated
8CH MEMS variable optical attenuators
Pages 596-601
Chengkuo Lee
Abstract |
Fabrication
of nanofluidic devices in glass with polysilicon electrodes
Pages 602-607
V.G. Kutchoukov, L. Pakula, G.O.F. Parikesit, Y. Garini, L.K. Nanver and
A. Bossche
Abstract |
Focused
ion beam fabrication of thermally actuated bimorph cantilevers
Pages 608-613
J. Teng and P.D. Prewett
Abstract |
Fabrication
of ultrasonic arrays with 7 μm PZT thick films as ultrasonic
emitter for object detection in air
Pages 614-619
Hong Zhu, Jianmin Miao, Zhihong Wang, Changlei Zhao and Weiguang Zhu
Abstract |
Three-dimensional
force sensor by novel alkaline etching technique
Pages 620-626
É. Vázsonyi, M. Ádám, Cs. Dücső, Z. Vízváry, A.L. Tóth and
I. Bársony
Abstract |
Micro-mold
fabrication by PET anisotropic ultra-violet assisted etching suitable
for 3D structures on Si
Pages 627-632
S. Famini, B. Fallah, M. Sadeghi, M. Araghchini, S. Mohajerzadeh, M.
Abdolhamidi and B. Sadeghi
Abstract |
Electrochemical
deposition of Cu and Ni/Cu multilayers in Si Microsystem Technologies
Pages 633-639
C. Serre, N. Yaakoubi, S. Martínez, A. Pérez-Rodríguez, J.R. Morante,
J. Esteve and J. Montserrat
Abstract |
Etch-stop
characteristics of heavily B/Ge-doped silicon epilayer in KOH and TMAH
Pages 640-645
Svetlana Tatic-Lucic, Wen-Yue Zhang and Navneet Navneet
Abstract |
Novel
room-temperature first-level packaging process for microscale devices
Pages 646-654
Wen-Yue Zhang, Joseph P. Labukas, Svetlana Tatic-Lucic, Lyndon Larson,
Thirumalesh Bannuru, Richard P. Vinci and Gregory S. Ferguson
Abstract |
STM
carbon nanotube tips fabrication for critical dimension measurements
Pages 655-659
A. Pasquini, G.B. Picotto and M. Pisani
Abstract |
Fabrication
and characterization of bolometric oxide thin film based on
vanadium–tungsten alloy
Pages 660-664
Yong-Hee Han, Kun-Tae Kim, Nguyen Chi-Anh, Hyun-Joon Shin, In-Hoon Choi
and Sung Moon
Abstract |
|
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Journal: SENSORS AND ACTUATORS A: PHYSICAL