Polymer investment molding: Method for fabricating hollow, microscale parts
Pages 2-10
Julian M. Lippmann, Emil J. Geiger and Albert P. Pisano
SummaryPlus |
A flip–chip encapsulation method for packaging of MEMS actuators using surface micromachined polysilicon caps for BioMEMS applications
Pages 11-19
Hrishikesh V. Panchawagh, Faheem F. Faheem, Cari F. Herrmann, David B. Serrell, Dudley S. Finch and Roop L. Mahajan
SummaryPlus |
A single cell electrophysiological analysis device with embedded electrode
Pages 20-26
Sha Li and Liwei Lin
SummaryPlus |
Novel direct-write CMOS-based laboratory-on-chip: Design, assembly and experimental results
Pages 27-36
Ebrahim Ghafar-Zadeh, Mohamad Sawan and Daniel Therriault
SummaryPlus |
Thermal buckling of eccentric microfabricated nickel beams as temperature regulated nonlinear actuators for flow control
Pages 37-46
Matthew McCarthy, Nicholas Tiliakos, Vijay Modi and Luc G. Fréchette
SummaryPlus |
The design of ARCTIC: A rotary compressor thermally insulated μcooler
Pages 47-56
Joshua D. Heppner, David C. Walther and Albert P. Pisano
SummaryPlus |
A computational investigation of noncontinuum gas-phase heat transfer between a heated microbeam and the adjacent ambient substrate
Pages 57-68
M.A. Gallis, J.R. Torczynski and D.J. Rader
SummaryPlus |
Effect of shape factors and material property variations on modeling the response of thermal microactuators
Pages 69-76
Amarendra Atre
SummaryPlus |
Design and characterization of microfabricated piezoresistive floating element-based shear stress sensors
Pages 77-87
A. Alvin Barlian, Sung-Jin Park, Vikram Mukundan and Beth L. Pruitt
SummaryPlus |
Electrical method to measure the dynamic behaviour and the quadrature error of a MEMS gyroscope sensor
Pages 88-97
Alfredo Cigada, Elisabetta Leo and Marcello Vanali
SummaryPlus |
Nonlinear dynamics of vibrating MEMS
Pages 98-108
Francesco Braghin, Ferruccio Resta, Elisabetta Leo and Guido Spinola
SummaryPlus |
Development and calibration of a stochastic dynamics model for the design of a MEMS inertial switch
Pages 109-118
Jr., R.V. Field and D.S. Epp
SummaryPlus |
Microfluidics for generation and characterization of liquid and gaseous micro- and nanojets
Pages 119-127
Nisarga Naik, Christophe Courcimault, Hanif Hunter, John Berg, Jungchul Lee, Kianoush Naeli, Tanya Wright, Mark Allen, Oliver Brand, Ari Glezer, et al.
SummaryPlus |
Characterization of liquid and gaseous micro- and nanojets using microcantilever sensors
Pages 128-139
Jungchul Lee, Kianoush Naeli, Hanif Hunter, John Berg, Tanya Wright, Christophe Courcimault, Nisarga Naik, Mark Allen, Oliver Brand, Ari Glezer, et al.
SummaryPlus |
Thermal effects on liquid film dynamics in spin coating
Pages 140-145
Lin Wu
SummaryPlus |
A novel multivalent nanomaterial based hydrogen peroxide sensor
Pages 146-151
Anjum Mehta, Swanand Patil, Hyungseok Bang, Hyoung J. Cho and Sudipta Seal
SummaryPlus |
Piezoelectric aluminum nitride MEMS annular dual contour mode filter
Pages 152-160
Philip J. Stephanou, Gianluca Piazza, Carolyn D. White, Muthu B.J. Wijesundara and Albert P. Pisano
SummaryPlus |
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| Materials and Technology section |
Fabrication of multilayer passive and active electric components on polymer using inkjet printing and low temperature laser processing
Pages 161-168
Seung Hwan Ko, Jaewon Chung, Heng Pan, Costas P. Grigoropoulos and Dimos Poulikakos
SummaryPlus
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Mechanical properties of ZnO nanowires
Pages 169-176
A.V. Desai and M.A. Haque
SummaryPlus |
Gradient residual stress induced elastic deformation of multilayer MEMS structures
Pages 177-185
Shusen Huang and Xin Zhang
SummaryPlus |
Planar micro-check valves exploiting large polymer compliance
Pages 186-193
Bozhi Yang and Qiao Lin
SummaryPlus |
A latchable microvalve using phase change of paraffin wax
Pages 194-200
Bozhi Yang and Qiao Lin
SummaryPlus |
Characterization and modeling of a microcapillary driven liquid–vapor phase-change membrane actuator
Pages 201-212
S.A. Whalen, C.D. Richards, D.F. Bahr and R.F. Richards
SummaryPlus |
Waveform design for pulse-and-hold electrostatic actuation in MEMS
Pages 213-220
Hartono Sumali, Jordan E. Massad, David A. Czaplewski and Christopher W. Dyck
SummaryPlus |
Characterization of a bimorph deformable mirror using stroboscopic phase-shifting interferometry
Pages 221-230
David A. Horsley, Hyunkyu Park, Sophie P. Laut and John S. Werner
SummaryPlus |
Design of fully compliant, in-plane rotary, bistable micromechanisms for MEMS applications
Pages 231-238
Rajesh Luharuka and Peter J. Hesketh
SummaryPlus |
Design of nano-gap piezoelectric resonators for mechanical RF magnetic field modulation
Pages 239-244
C.D. White, G. Piazza, P.J. Stephanou and A.P. Pisano
SummaryPlus |
Theoretical and experimental performance of a high frequency gas micropump
Pages 245-256
A.A. Astle, H.S. Kim, L.P. Bernal, K. Najafi and P.D. Washabaugh
SummaryPlus |
Large flow rate/high frequency microvalve array for high performance actuators
Pages 257-263
Dong Gun Lee, Daniel D. Shin and Gregory P. Carman
SummaryPlus |
Indentation testing of axisymmetric freestanding nanofilms using a MEMS load cell
Pages 264-270
Z.C. Leseman and T.J. Mackin
SummaryPlus |
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| Systems/Applications Section |
Device fabrication and integration with photodefinable microvalves for protein separation
Pages 271-277
Champak Das, Carl K. Fredrickson, Zheng Xia and Z. Hugh Fan
SummaryPlus |
Interconnecting fluidic packages and interfaces for micromachined sensors
Pages 278-285
Michael Pepper, Naveenkumar S. Palsandram, Peng Zhang, Moosung Lee and Hyoung J. Cho
SummaryPlus |
An integrated system of microcantilever arrays with carbon nanotube tips for imaging, sensing, and 3D nanomanipulation: Design and control
Pages 286-295
Eunjeong Lee
SummaryPlus |
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Journal: SENSORS AND ACTUATORS A: PHYSICAL