Detection of two parameters in the liquid by means of multifunctional sensing method using a pair of piezoelectric ceramics
Pages 297-302
Akira Kimoto and Katsunori Shida |
Flow meter for high-purity and aggressive liquids
Pages 303-309
M. Neuhaus, H. Looser, H. Burtscher, D. Schrag, J. Hahn and R. Schoeb |
Development of miniaturized 6-axis accelerometer utilizing piezoresistive sensing elements
Pages 310-320
Ranjith Amarasinghe, Dzung Viet Dao, Toshiyuki Toriyama and Susumu Sugiyama |
Hydrodynamic fabrication and characterization of a pH-responsive microscale spherical actuating element
Pages 321-328
DuckJoong Kim, SungRak Kim, JiYoung Park, JuYeoul Baek, SeonJeong Kim, Kyung Sun, TaeSoo Lee and SangHoon Lee |
Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage
Pages 329-333
Hyo-Jin Nam, Young-Sik Kim, Caroline Sunyong Lee, Won-Hyeog Jin, Seong-Soo Jang, Il-Joo Cho, Jong-Uk Bu, Woo Beom Choi and Seung Woo Choi |
Fabrication of a millinewton force sensor using low temperature co-fired ceramic (LTCC) technology
Pages 334-338
Hansu Birol, Thomas Maeder, Ingo Nadzeyka, Marc Boers and Peter Ryser |
Magneto-optical phase modulation in integrated Mach–Zehnder interferometric sensors
Pages 339-347
B. Sepúlveda, G. Armelles and L.M. Lechuga |
Characterization of Yb2O3 based optical temperature sensor for high temperature applications
Pages 348-356
Ayan Bhattacharya, R. Srinivasa Rao and M. Ghanashyam Krishna |
A new modeling and validation of two-axis miniature fine sun sensor
Pages 357-365
Young-Keun Chang, Mi-Yeon Yun and Byung-Hoon Lee |
A Linear optical sensor for measuring needle displacement in common-rail diesel injectors
Pages 366-373
Marco Coppo, Claudio Dongiovanni and Claudio Negri |
Compensation of the anisotropic behavior of single crystalline silicon in a 3D tactile sensor
Pages 374-381
E.J.C. Bos, R.W.P. Heldens, F.L.M. Delbressine, P.H.J. Schellekens and A. Dietzel |
An implantable capacitive pressure sensor for biomedical applications
Pages 382-388
Chia-Chu Chiang, Chou-Ching K. Lin and Ming-Shuang Ju |
Accurate high-resolution fiber-optic distributed strain measurements for structural health monitoring
Pages 389-395
Romeo Bernini, Aldo Minardo and Luigi Zeni |
Low-cost DC electric field sensor
Pages 396-398
Ben-Zion Kaplan, Vladimir Boroda and Uri Suissa |
A novel method to measure the movement interferences for multi-axis lens actuator in optical disc system
Pages 399-404
Lei Huang, Mali Gong, Ping Yan and Qiang Liu |
Design of integrated wavelength monitor based on a Y-branch with an S-bend waveguide
Pages 405-409
Qian Wang, Gerald Farrell, Pengfei Wang, Ginu Rajan and Thomas Freir |
Frequency-domain displacement sensing with a fiber ring-resonator containing a variable gap
Pages 410-413
Frank Vollmer and Peer Fischer |
On the response of a resonating plate in a liquid near a solid wall
Pages 414-426
Christopher Harrison, Emmanuel Tavernier, Olivier Vancauwenberghe, Eric Donzier, Kai Hsu, Anthony R.H. Goodwin, Frederic Marty and Bruno Mercier |
PVDF corrugated transducer for ultrasonic ranging sensor
Pages 427-435
Minoru Toda and Jerry Dahl |
Unified mechanical approach to piezoelectric bender modeling
Pages 436-446
Robert Dunsch and Jean-Marc Breguet |
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| Materials and Technology Section |
Effect of doping level and spray time on zinc oxide thin films produced by spray pyrolysis for transparent electrodes applications
Pages 447-451
Z. Ben Achour, T. Ktari, B. Ouertani, O. Touayar, B. Bessais and J. Ben Brahim |
The characteristics of low-temperature sintered PbTiO3 based ceramics and its applications
Pages 452-456
Te-Yi Chen, Sheng-Yuan Chu, Ren-Chuan Chang, Chih-Kao Cheng, Cheng-Shong Hong and Hsiau-Hsian Nien |
Polymer MEMS processing for multi-user applications
Pages 457-464
Dan Sameoto, See-Ho Tsang and M. Parameswaran |
Effect of magnesium in KOH solution on the anisotropic wet etching of silicon
Pages 465-470
Hiroshi Tanaka, Di Cheng, Mitsuhiro Shikida and Kazuo Sato |
Actuation potentials and capillary forces in electrowetting based microsystems
Pages 471-479
Jean Berthier, Philippe Dubois, Philippe Clementz, Patricia Claustre, Christine Peponnet and Yves Fouillet |
Transverse 1-3 piezoelectric ceramic/polymer composite with multi-layered PZT ceramic blocks
Pages 480-485
Chang-Bun Yoon, Sung-Mi Lee, Seung-Ho Lee, Hyoun-Ee Kim and Kyung-Woo Lee |
3D droplet displacement in microfluidic systems by electrostatic actuation
Pages 486-493
Jean-Maxime Roux, Yves Fouillet and Jean-Luc Achard |
Mechanical behavior of an acrylic elastomer used in dielectric elastomer actuators
Pages 494-504
Michael Wissler and Edoardo Mazza |
Electro-mechanical equivalent circuit of a piezoelectric ceramic thin circular ring in radial vibration
Pages 505-512
Shuyu Lin |
Novel microstepping control methods for electromagnetic micromotors with star-connected winding
Pages 513-518
Zhenbo Li, Jiapin Chen, Xiang Ge and Chen Zhang |
Windmill-type ultrasonic micromotor fabricated by thermoplastic green machining process
Pages 519-524
Chang-Bun Yoon, Sung-Mi Lee, Hyoun-Ee Kim and Kyung-Woo Lee |
A large-active-area light-blocking based switch for people with disability
Pages 525-531
Sarun Sumriddetchkajorn and Ratthasart Amarit |
Preparing of a high speed bistable electromagnetic RF MEMS switch
Pages 532-537
Yong-hua Zhang, Guifu Ding, Xiaofeng Shun, Donghua Gu, Bingchu Cai and Zongsheng Lai |
Influence of target design on the damage threshold for optically powered MEMS thermal actuators
Pages 538-543
Leslie M. Phinney and Justin R. Serrano |
Domain reorientation of piezoelectric bending actuators
Pages 544-554
Tao Li, Y.H. Chen, F.Y.C. Boey and J. Ma |
Review of MEMS-based drug delivery and dosing systems
Pages 555-564
Nan-Chyuan Tsai and Chung-Yang Sue |
Contactless suspension and transportation of glass panels by electrostatic forces
Pages 565-574
Jong Up Jeon, Kyu-Yeol Park and Toshiro Higuchi |
Wafer-scale fabrication of infrared detectors based on tunneling displacement transducers
Pages 575-581
Olaleye Ajakaiye, John Grade, Choongsoo Shin and Thomas Kenny |
Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators
Pages 582-593
Zhili Hao and Farrokh Ayazi |
Frequency dependent fluid damping of micro/nano flexural resonators: Experiment, model and analysis
Pages 594-599
Weibin Zhang and Kimberly Turner |
Influence of metal stress on RF MEMS capacitive switches
Pages 600-605
Richard E. Strawser, Kevin D. Leedy, Rebecca Cortez, John L. Ebel, Steven R. Dooley, Cari F. Herrmann Abell and Victor M. Bright |
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| Systems/Applications Section |
A high performance planar pump using electro-conjugate fluid with improved electrode patterns
Pages 606-614
Woo-Suk Seo, Kazuhiro Yoshida, Shinichi Yokota and Kazuya Edamura |
Group sensor method with statistics
Pages 615-621
Kiyohisa Nishiyama, Mike C.L. Ward and Raya Khalil AL-Dadah |
Methodology of evaluating safety in automobiles using intelligent sensor architecture and neural networks
Pages 622-630
Alberto Rovetta, Chiara Zocchi, Alessandro Giusti, Alessandro Adami and Francesco Scaramellini |
Fabrication of gapless triangular micro-lens array
Pages 631-640
C.T. Pan and C.H. Su |
The study of event recognition technology of ticket gate in urban railway traffic
Pages 641-649
Qu Ri, Bao Yan-ru and Ren Chang-ming |
Induction electrohydrodynamics micropump for high heat flux cooling
Pages 650-659
Vishal Singhal and Suresh V. Garimella |
Design of low-temperature CMOS-process compatible membrane fabricated with sacrificial aluminum layer for thermally isolated applications
Pages 660-667
Kow-Ming Chang, Ren-Jie Lin and I-Chung Deng |
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Journal: SENSORS AND ACTUATORS A: PHYSICAL