Journal Sensors and Actuator A: Physical, Vol. 143, Issue 1

Journal: SENSORS AND ACTUATORS A: PHYSICAL

ISSN: 0924-4247 Vol.143, Issue 1

Micromechanics Section of Sensors and Actuators (SAMM), based on contributions revised from the Technical Digest of the IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS 2007) - MEMS 2007, Kobe, Japan
21-25 January 2007

Date: 2 May 2008

Physical Section

Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels
Pages 1-6
M. Dijkstra, M.J. de Boer, J.W. Berenschot, T.S.J. Lammerink, R.J. Wiegerink and M. Elwenspoek

Materials and Technology Section

Modular microfluidic interconnects using photodefinable silicone microgaskets and MEMS O-rings
Pages 7-13
Scott Miserendino and Yu-Chong Tai

Actuator Section

Pulsation sensor integrated with microvascular holding actuator for thrombosis monitoring
Pages 14-19
Takashi Mineta, Nozomi Kida, Satoshi Nomura, Eiji Makino, Takashi Sugawara, Satoshi Toh and Takayuki Shibata

Micromechanics Section

Biodegradable polymer needle with various tip angles and consideration on insertion mechanism of mosquito's proboscis
Pages 20-28
Seiji Aoyagi, Hayato Izumi and Mitsuo Fukuda

Vertically moving micromirror for detectors in the mid infrared
Pages 29-33
Niels Quack, Stefan Blunier, Jurg Dual, Martin Arnold, Ferdinand Felder, Christian Ebneter, Mohamed Rahim and Hans Zogg

Fabrication and characterization of arbitrary shaped μIPMC transducers for accurately controlled biomedical applications
Pages 34-40
Guo-Hua Feng and Ri-Hong Chen

An electrochemical intraocular drug delivery device
Pages 41-48
Po-Ying Li, Jason Shih, Ronalee Lo, Saloomeh Saati, Rajat Agrawal, Mark S. Humayun, Yu-Chong Tai and Ellis Meng

Passive water removal in fuel cells by capillary droplet actuation
Pages 49-57
Tobias Metz, Nils Paust, Claas Müller, Roland Zengerle and Peter Koltay

Micro-bubble formation with organic membrane in a multiphase microfluidic system
Pages 58-63
Takahiro Arakawa, Takahiro Yamamoto and Shuichi Shoji

Single-cell assay on CD-like lab chip using centrifugal massive single-cell trap
Pages 64-69
Sung-Woo Lee, Ji Yoon Kang, In-Hye Lee, Sung-Shin Ryu, Seung-Min Kwak, Kyeong-Sik Shin, Choong Kim, Hyo-Il Jung and Tae-Song Kim

A micro-direct methanol fuel cell stack with optimized design and microfabrication
Pages 70-76
Lingyan Zhong, Xiaohong Wang, Yingqi Jiang, Qian Zhang, Xinping Qiu, Yan’an Zhou and Litian Liu

Development of fabrication process for integrated micro-optical elements on Si substrate
Pages 77-83
Junji Ohara, Kazuhiko Kano and Yukihiro Takeuchi

Pneumatic gas regulator with cascaded PDMS seal valves
Pages 84-89
Ok Chan Jeong and Satoshi Konishi

Demonstration of cortical recording using novel flexible polymer neural probes
Pages 90-96
André Mercanzini, Karen Cheung, Derek L. Buhl, Marc Boers, Anne Maillard, Philippe Colin, Jean-Charles Bensadoun, Arnaud Bertsch and Philippe Renaud

Three-dimensionally combined carbonized polymer sensor and heater
Pages 97-105
Ok Chan Jeong and Satoshi Konishi

Micro-energy storage system using permanent magnet and high-temperature superconductor
Pages 106-112
Kangwon Lee, Ji-eun Yi, Bongsu Kim, Junseok Ko, Sangkwon Jeong, Myoungyu Noh and Seung S. Lee

Micro-impedance inclinometer with wide-angle measuring capability and no damping effect
Pages 113-119
Che Hsin Lin and Shu Ming Kuo

AlCuMgMn micro-tensile samples: Mechanical characterization of MEMS materials at micro-scale
Pages 120-128
Robert Modlinski, Robert Puers and Ingrid De Wolf

Reconfigurable liquid micro-lenses with high positioning accuracy
Pages 129-135
F. Krogmann, R. Shaik, L. Lasinger, W. Mönch and H. Zappe

Mechanical calibration of MEMS springs with sub-micro-Newton force resolution
Pages 136-142
Kenji Miyamoto, Tomoya Jomori, Koji Sugano, Osamu Tabata and Toshiyuki Tsuchiya

An integrated flexible temperature and tactile sensing array using PI-copper films
Pages 143-153
Y.-J. Yang, M.-Y. Cheng, W.-Y. Chang, L.-C. Tsao, S.-A. Yang, W.-P. Shih, F.-Y. Chang, S.-H. Chang and K.-C. Fan

On the wet etching of Pyrex glass
Pages 154-161
Ciprian Iliescu, Bangtao Chen and Jianmin Miao

Systems/Applictions Section

Monolithic 1-Chip FBAR duplexer for W-CDMA handsets
Pages 162-168
Kuangwoo Nam, Yunkwon Park, Byeoungju Ha, Chulsoo Kim, Jeashik Shin, Seokchool Yun, Jaemoon Pak, Gwangseo Park and Insang Song

Technology Section

A novel intelligent textile technology based on silicon flexible skins
Pages 169-174
Rakesh B. Katragadda and Yong Xu

Glass-blown spherical microcells for chip-scale atomic devices
Pages 175-180
E. Jesper Eklund, Andrei M. Shkel, Svenja Knappe, Elizabeth Donley and John Kitching

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