Journal: SENSORS AND ACTUATORS A: PHYSICAL
ISSN: 0924-4247 Vol.165/1
Date: January 2011
1.
Editorial Board Page CO2
2.
Preface Page 1P.J. French
Physical section
3.
Capacitive tactile sensor array for touch screen application Pages 2-7Hong-Ki Kim, Seunggun Lee, Kwang-Seok Yun
4.
Development of SAW based gyroscope with high shock and thermal stability Pages 8-15Haekwan Oh, Wen Wang, Sangsik Yang, Keekeun Lee
5.
Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors Pages 16-25Trong Thi Mai, Fu-Li Hsiao, Chengkuo Lee, Wenfeng Xiang, Chii-Chang Chen, W.K. Choi
6.
Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering Pages 26-34Alexander A. Trusov, Adam R. Schofield, Andrei M. Shkel
7.
Micromachined gyroscope concept allowing interchangeable operation in both robust and precision modes Pages 35-42Adam R. Schofield, Alexander A. Trusov, Andrei M. Shkel
8.
Study, design, microfabrication and characterization of a new CMOS compatible multi-terminal pressure sensor with enhanced sensitivity Pages 43-53Guilherme de Oliveira Coraucci, Fabiano Fruett
9.
Buckling control of silicon dioxide diaphragms by lateral stress enhancement for sensitivity improvement of piezoelectric ultrasonic microsensors Pages 54-58K. Yamashita, T. Watanabe, T. Yoshizaki, M. Noda, M. Okuyama
10.
Analysis of high-Q, gallium nitride nanowire resonators in response to deposited thin films Pages 59-65J.R. Montague, M. Dalberth, J.M. Gray, D. Seghete, K.A. Bertness, S.M. George, V.M. Bright, C.T. Rogers, N.A. Sanford
11.
Exploitation of aeroelastic effects for drift reduction, in an all-polymer air flow sensor Pages 66-72C. Song, A.R. Aiyar, S.-H. Kim, M.G. Allen
12.
Integration of piezoelectric tunable capacitors and bonded-wire inductors for contactless RF switch and tunable filter Pages 73-78Shih-Jui Chen, Chuang-Yuan Lee, Eun Sok Kim
13.
Experimental study of the effect of hydrodynamic coupling of micro-cantilever array on the dynamic response of micro-cantilever Pages 79-85Jiunn-Horng Lee, Yung-Dong Lau, Chih-Min Yao, Weileun Fang
Actuator section
14.
A novel thermo-pneumatic peristaltic micropump with low temperature elevation on working fluid Pages 86-93 Bonnie Tingting Chia, Hsin-Hung Liao, Yao-Joe Yang
15.
Angular vertical comb actuators assembled on-chip using in-plane electrothermal actuators and latching mechanisms Pages 94-100Youngkee Eun, Hyungjoo Na, Jungwook Choi, Jae-ik Lee, Jongbaeg Kim
Material and technology section
16.
Multi-layer atom chips for atom tunneling experiments near the chip surface Pages 101-106Ho-Chiao Chuang, Evan A. Salim, Vladan Vuletic, Dana Z. Anderson, Victor M. Bright
Technology section
17.
Atomic layer deposition enabled interconnect technology for vertical nanowire arraysJen-Hau Cheng, Dragos Seghete, Myongjai Lee, John B. Schlager, Kris A. Bertness, Norman A. Sanford, Ronggui Yang, Steven M. George, Y.C. Lee
18.
Realistic imitation of mosquito's proboscis: Electrochemically etched sharp and jagged needles and their cooperative inserting motion Pages 115-123Hayato Izumi, Masato Suzuki, Seiji Aoyagi, Tsutomu Kanzaki
19.
Studies on low-temperature direct bonding of VUV, VUV/O3 and O2 plasma pretreated cyclo-olefin polymer Pages 124-131Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji
Interfaces
20.
Low-power temperature-to-frequency converter consisting of subthreshold CMOS circuits for integrated smart temperature sensors Pages 132-137Ken Ueno, Tetsuya Asai, Yoshihito Amemiya
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