Journal : SENSORS AND ACTUATORS A: PHYSICAL
Journal : SENSORS AND ACTUATORS A: PHYSICAL
ISSN : 0924-4247 Vol./Iss. : 72 / 1
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Reflexions on the future of microsystems Lang , Walter pp.: 1-15 Processing and interaction in robotics Amigoni , Francesco pp.: 16-26 A linear multisensor for temperature and magnetic field based on diode structure Roumenin , Ch.S. pp.: 27-31 Magnetic--acoustic--resonator sensors (MARS): a new sensing methodology Stevenson , Adrian C. pp.: 32-37 The determination of the effective ambient temperature for thermal flow sensors in a non-isothermal environment van Oudheusden , B.W. pp.: 38-45 Silicon--glass wafer bonding with silicon hydrophilic fusion bonding technology Xiao , Zhi-Xiong pp.: 46-48 Phenomenological model for gas-damping of micromechanical structures Greywall , Dennis S. pp.: 49-70 Measurement errors in the scanning of piezoresistive sensors arrays D'Alessio , Tommaso pp.: 71-76 Non-linear vibration behavior of thin multilayer diaphragms Paneva , R. pp.: 79-87 Average power control and positioning of polysilicon thermal actuators Butler , Jeffrey T. pp.: 88-97 |
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