Journal : SENSORS AND ACTUATORS A: PHYSICAL
Journal : SENSORS AND ACTUATORS A: PHYSICAL
ISSN : 0924-4247 Vol./Iss. : 72 / 2
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Fluid property investigation by impedance characterization of quartz crystal resonators Part I: Methodology, crystal
screening, and Newtonian fluids,
Nwankwo , E. pp.: 99-109 Electro-thermal modelling of infrared microemitters using PSPICE Kiran , S. Ravi pp.: 110-114 CoMSaT: a single-chip fabrication technique for three-dimensional integrated fluid systems Zou , Quanbo pp.: 115-124 Fabrication of glassy carbon microstructures by soft lithography Schueller , Olivier J.A. pp.: 125-139 Stability study of carbon graphite covered quartz crystal Kim , Jong-Min pp.: 140-147 Calibration and temperature compensation of silicon pressure sensors using ion-implanted trimming resistors Lee , Bo-Na pp.: 148-152 Novel prevention method of stiction using silicon anodization for SOI structure Matsumoto , Y. pp.: 153-159 Water glass bonding Satoh , Akinobu pp.: 160-168 Self-sensing magnetic levitation using a LC resonant circuit Choi , Changhwan pp.: 169-177 Self-excited piezoelectric PZT microcantilevers for dynamic SFM---with inherent sensing and actuating capabilities Lee , Chengkuo pp.: 179-188 A new process for releasing micromechanical structures in surface micromachining with polysilicon support and LPCVD Si3N4 embedded mask, Xiao , Zhixiong pp.: 189-194 |
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