Journal : SENSORS AND ACTUATORS A: PHYSICAL
ISSN : 0924-4247 Vol./Iss. : 77 / 1
Ultrasonic circular inspection for object recognition with
sensor-robot integration, A. Lazaro Del Pozo, pp. 1-8. The spread eta and Vgo and its influence on the sensitivity of a bipolaric celsius sensor, R. Amador, pp. 9-13. Fabrication of a 3D differential-capacitive acceleration sensor by UV-LIGA, W. Qu, pp. 14-20. Determining thermal expansion coefficients of thin films using micromachined cantilevers, W. Fang, pp. 21-27. Voltage responsivity of pyroelectric sensor, W.K. Sakamoto, pp. 28-33. Applications of TiNi thin film shape memory alloys in micro-opto-electro-mechanical systems, M. Tabib-Azar, pp. 34-38. A new type of dielectric bolometer mode of detector pixel using ferroelectric thin film capacitors for infrared image sensor, M. Noda, pp. 39-44. Two temperature sensors with signal-conditioning amplifiers realized in BiCMOS technology, I.M. Filanovsky, pp. 45-53. Novel interconnection technologies for integrated microfluidic systems, B.L. Gray, N.I. Maluf, pp. 57-65. A micro fluxgate magnetic sensor using micromachined planar solenoid coils, T.M. Liakopoulos, pp. 66-72. High-aspect-ratio rotary polygon micromotor scanners, A.A. Yasseen, pp. 73-79. |
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