Journal : SENSORS AND ACTUATORS A: PHYSICAL
ISSN : 0924-4247 Vol./Iss. : 77 / 2
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Characterization of the anistropic chemical attack of {hk0} silicon plates in a T.M.A.H. solution. Determination of a database,
A.R. Charbonnieras, C. Tellier, pp. 81-97 A new technology for fluidic microsystems based on PCB technology, T. Merkel, pp. 98-105 Measurement of the effective transverse piezoelectric coefficient e31,f of AIN and Pb(Zrx,Ti1-x)O3 thin films, M.A. Dubois, pp. 106-112 Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process, M. Chen, Z. Xiao, pp. 113-119 Ozone sensor made by dip coating method, A. Hattori, pp. 120-125 Voltage gain characteristics of Piezoelectric transformer using PbTiO3 system ceramics, Y.H. Jeong, S.H. Lee, pp. 126-130 Strain studies in LPCVD polysilicon for surface micromachined devices, A. Chand, pp. 133-138 Photopatterning of thermally sensitive hydrogels useful for microactuators, J. Hoffmann, M. Plotner, pp. 139-144 A miniature shape memory alloy pinch valve, C.M. Pemble, pp. 145-148 Micro-stereolithography of polymeric and ceramic microstructures, X. Zhang, pp. 149-156 Shape memory micro-actuation for a gastro-intestinal intervention system, D. Reynaerts, pp. 157-166 |
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