Deflection of surface micromachined devices due to internal, homogeneous or gradient stresses,
S. Greek, pp. 1-7
Modeling, design, fabrication and measurement of a single layer polysilicon micromirror with initial curvature compensation,
Y.H. Min, pp. 8-17
Techniques to improve the flatness of reflective micro-optical arrays,
K. Seunarine, pp. 18-27
Bistable micromechanical fiber-optic switches on silicon with thermal actuators,
M. Hoffmann, pp. 28-35
Surface micro-machined optical coherent detection system with ultra-high sensitivity,
C. Pu, pp. 36-40
Diamond microstructures for optical MEMS,
H. Bjorkman, pp. 41-47
Proposal of human eye's crystalline lens-like variable focusing lens,
S.H. Ahn, pp. 48-53
Surface-micromachined polysilicon MOEMS for adaptive optics,
J. Comtois, pp. 54-62
Design and fabrication of 10x10 micro SLM array for phase and amplitude modulation,
S.W. Chung, pp. 63-70
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