Journal S&A 79 2

Journal : SENSORS AND ACTUATORS A: PHYSICAL

ISSN : 0925-4005 Vol./Iss. : 79 / 2

Real-time compensation of hysteresis and creep in piezoelectric actuators,
H. Janocha, pp. 83-89

Optical fiber strain gauge based on a tapered sinle-mode fiber,
F.I. Arregui, pp. 90-96

Method of evaluating frequency characteristics of pressure tranducers using newly development dynamic pressure generator,
T. Kobata, pp. 97-101

Development of new capacitive strain sensors based on thick film polymer and cermet technologies
K.I. Arshak, pp. 102-114

Integrated flow sensor for in-situ measurement and control of acoustic streaming in flexural-plate-wave micropumps,
N.T. Nguyen, pp. 115-121

High sensitive infrared temperature sensor using self-heating compensated microbolometers,
M.V.S. Ramakrishna, G. Karunasiri, pp. 122-127

Dynamic actuation properites of TiNi shape memory diaghragm,
E. Makino, pp.128-135

A novel technique for measuring etch rate distribution of Si,
H. Yang, M. Bao, pp.136-140

Hemispherical-grained LPCVD-polysilicon films for use in MEMS applications,
K. Suzuki, pp.141-146

In situ measurement of porous silicon and the influence of ambient gas on its properties,
D.I. Bilenko, pp.147-152

Cure monitoring of smart composites using fiber bragg grating (FBG) based embedded sensors,
V.M. Murukeshan, pp.153-161

Performance of fabry-perot microcavity structures with corrugated diaphragms,
J. Han, pp. 162-172