Comparative study on the performance of InAs/Al0.2Ga0.8Sb quantum well hall sensors on germanium and GaAs substrates, M. Behet, pp.175-178

Theoretical analysis of the optimum wavelength combination in a two-wavelength combination source for optical fiber interferometric sensing, D.N. Wang, pp.179-188

Porous silicon layer coupled with thermoelectric cooler: a humidity sensor,
A. Foucaran, pp.189-193

A flexible micromachine-based shear-stress sensor array and its application to separation-point detection,
G.B. Lee, pp.194-203

An optomechanical pressure sensor using multimode interference couplers with polymer waveguides on a thin p+-Si membrane,

D. Hah, pp. 204-210

Thermal analysis and simulation of the micro channel flow in miniature thermal conductivity detectors,
K. Chen, pp. 211-218

Open-loop operating mode of micromachined capacitive accelerometer, 
B. Li, pp.219-223

Surface ruthenated hyudrocarbon sensor: Statistical optimisation of sensitivity,
V.A. Chaudhary, K. Vijayamohanan, pp. 224-229

Influence analysis of dwell time on focused ion beam micromachining in silicon,
Y. Fu, pp.230-234

Studies on SiO2-SiO2 bonding with hydrofluoric acid - room temperature and low stress bonding technique for MEMS, 
H. Nakanishi, pp.237-244

Factors enhancing the reliability of touch-mode electrostatic actuators,
C. Cabuz, pp.245-250

Micromachining of TiNi shape memory thin film for fabrication of micropump,
E. Makino, pp.251-259