Journal : SENSORS AND ACTUATORS A: PHYSICAL
ISSN : 0924-4247 Vol./Iss.: 95 /2-3
Date : 01-Jan-2002
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A high density microchannel network with integrated valves and photodiodes, D. Baechi, R. Buser, J. Dual, pp.77-83, Abstract.
Micromachined Faraday cup array using deep reactive ion etching, R.B. Darling, A.A. Scheidemann, K.N. Bhat, T.-C. Chen, pp. 84-93. Abstract.
Micromachined barbed spikes for mechanical chip attachment, P. Griss, P. Enoksson, G. Stemme, pp. 94-99. Abstract.
A passive wireless integrated humidity sensor, T.J. Harpster, B. Stark, K. Najafi, pp.100-107. Abstract.
A new monolithic microbiosensor for whole blood analysis, J.-H. Kim, B.-G. Kim, J.-B. Yoon, E. Yoon, C.-H. Han, pp.108-113. Abstract.
A monolithic inkjet print head: DomeJet, S.-W. Lee, H.-C. Kim, K. Kuk, Y.-S. Oh, pp.114-119. Abstract.
Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer, L.-A. Liew, Y. Liu, R. Luo, T. Cross, L. An, V.M. Bright, M.L. Dunn, J.W. Daily, R. Raj, pp. 120-134. Abstract.
Development of the micro rotary fan, R.J. Linderman, P.E. Kladitis, V.M. Bright, pp 135-142. Abstract.
Application of microforging to SiCN MEMS fabrication, Y. Liu, L.-A. Liew, R. Luo, L. An, M.L. Dunn, V.M. Bright, J.W.Daily, R. Raj, pp.143-151. Abstract.
Flip-chip fabrication of advanced micromirror arrays, M. Adrian Michalicek, V.M. Bright, pp.152-167. Abstract.
Near-field recording with high optical throughput aperture array, P.N. Minh, T. Ono, S. Tanaka, K. Goto, M. Esashi, pp.168-174. Abstract.
CMOS-MEMS membrane for audio-frequency acoustic actuation, J.J. Neumann, K.J. Gabriel, pp.175-182. Abstract.
Large stroke actuation of continuous membrane for adaptive optics by 3D self-assembled microplates, E. Quevy, P. Bigotte, D. Collard, L. Buchaillot, pp.183-195. Abstract.
The first low voltage, low noise differential silicon microphone, technology development and measurement results, P. Rombach, M. Mullenborn, U. Klein, K. Rasmussen, pp.196-201. Abstract.
MEMS techniques applied to the fabrication of anti-scatter grids for X-ray imaging, V. Lehmann, S. Ronnebeck, pp.202-207. Abstract.
Multi-source power supply system using micro-photovoltaic devices combined with microwave antenna, T. Sakakibara, H. Izua, T. Shibata, H. Tarui, K. Shibata, S. Kiyama, N. Kawahara, pp.208-211. Abstract.
Vertical comb-finger capacitive actuation and sensing for CMOS-MEMS, H. Xie, G.K. Fedder, pp. 212-221. Abstract.
Acoustic impedance control through structural tuning by pneumatic balloon actuators, M. Yoda, S. Konishi, pp.222-226. Abstract.
Fabrication of micro electro-rheological valves (ER valves) by micromachining and experiments, K. Yoshida, M. Kikuchi, J.-H. Park, S. Yokota, pp.227-233. Abstract.
Ciliary motion actuator using self-oscillating gel, O. Tabata, H. Hirasawa, S. Aoki, R. Yoshida, E. Kokufuta, pp. 234-238. Abstract.
Decoupled microgyros and the design principle DAVED, W. Geiger, W.U. Butt, A. Gaiszer, J. Frech, M. Braxmaier, T. Link, A. Kohne, P. Nommensen, H. Sandmaier, W. Lang, H. Sandmaier, pp.239-249. Abstract.
A novel strategy for the design of multiple reaction systems for genetic analysis, M. Krishnan, S.N. Brahmasandra, D.T. Burke, C.H. Mastrangelo, M.A.Burns, pp.250-258. Abstract.
Electrowetting and electrowetting-on-dielectric for microscale liquid handling, J. Lee, H. Moon, J. Fowler, T. Schoellhammer, C.-J. Kim, pp.259-268. Abstract.
Selective drive of electrostatic actuators using remote inductive powering, S. Takeuchi, I. Shimoyama, pp.269-273. Abstract.
A prototype of ultrasonic micro-degassing device for portable dialysis system, Z. Yang, S. Matsumoto, R. Maeda, pp.274-280. Abstract.
Fabrication of single-crystal Si cantilever array, D. Saya, K. Fukushima, H. Toshiyoshi, G. Hashiguchi, H. Fujita, H.Kawakatsu, pp.281-287. Abstract.
Conference Calendar, pp.288
Key Conferences on Sensors, pp.289-290
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