Polysilicon: a versatile material for microsystems,

P.J. French, pp 3-12. Abstract.

Thermal isolation in microsystems with porous silicon,

V. Lysenko, S. Perichon, B. Remaki, D. Barbier, pp.13-24. Abstract.

Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications,

E.J. Connolly, G.M. O'Halloran, H.T.M. Pham, P.M. Sarro, P.J. French, pp.25-30. Abstract.

Correlation between epitaxial growth conditions of 3C-SiC thin films on Si and mechanical behavior of 3C-SiC self-suspended membranes,

C. Gourbeyre, T. Chassagne, M. Le Berre, G. Ferro, E. Gautier, Y.Monteil, D. Barbier, pp.31-34. Abstract.

On the properties and functionality of ultra-thin diamond related protective coatings used in optical systems,

M. Gioti, S. Logothetidis, C. Charitidis, Y. Panayiotatos, I. Varsano, pp.35-40. Abstract.

Electrochemical deposition of metal layers and structures for Si-based microsystems,

S. Martnez, N. Yaakoubi, A. Perez-Rodrguez, C. Serre, P. Gorostiza, J.R. Morante, J. Esteve, pp.41-44. Abstract.

Rhenium deposition on a silicon surface at the room temperature for application in microsystems,

V. Petrovich, M. Haurylau, S. Volchek, pp.45-48. Abstrract.

Copper micromoulding process for NMR microinductors realization,

A.-L. Coutrot, E. Dufour-Gergam, J.-M. Quemper, E. Martincic, J.-P.Gilles, J.-P. Grandchamp, M. Matlosz, A. Sanchez, L. Darasse, J.-C.Ginefri, pp.49-54. Abstract.

Structural characterisation of NiTi thin film shape memory alloys,

F.M.B. Fernandes, R. Martins, M. Teresa Nogueira, R.J.C. Silva, P.Nunes, D. Costa, I. Ferreira, R. Martins,

pp. 55-58. Abstract.

Shape memory thin films with transition above room temperature from Ni-rich NiTi films,

N. Frantz, E. Dufour-Gergam, J.P. Grandchamp, A. Bosseboeuf, W.Seiler, G. Nouet, G. Catillon, pp.59-63. Abstract.

PZT thin films integration for the realisation of a high sensitivity pressure microsensor based on a vibrating membrane,

E. Defay, C. Millon, C. Malhaire, D. Barbier, pp.64-67. Abstract,

Time effect on the ferroelectric properties of SrBi2Ta2O9 thin films in forming gas processing,

T. Yu, D.-S. Wang, D. Wu, A.-D. Li, A. Hu, Z.-G. Liu, N.-B. Ming, pp.68-70. Abstract.

Photoluminescence of Eu-doped titania xerogel spin-on deposited on porous anodic alumina,

N.V. Gaponenko, I.S. Molchan, G.E. Thompson, P. Skeldon, A. Pakes, R.Kudrawiec, L. Bryja, J. Misiewicz, pp. 71-73. Abstract.

Conducting polymer films by UV-photo processing,

Q. Fang, D.G. Chetwynd, J.W. Gardner, pp.74-77. Abstract.

Fabrication of UV-transparent SixOyNz membranes with a low frequency PECVD reactor,

K. Danaie, A. Bosseboeuf, C. Clerc, C. Gousset, G. Julie, pp.78-81. Abstract.

The etching behavior of APCVD PSG thin films used as sacrificial layers for surface micromachined resonant microstructures,

M. Modreanu, C. Moldovan, R. Iosub, pp.82-84. Abstract.

Fabrication of capacitive micromechanical ultrasonic transducers by low-temperature process,

D. Memmi, V. Foglietti, E. Cianci, G. Caliano, M. Pappalardo, pp.85-91. Abstract.

Experiments for microphotonic components fabrication using Si <1 1 1> etching techniques,

D. Cristea, M. Purica, E. Manea, V. Avramescu, pp.92-97. Abstract.

Thermal investigation of micro-filament heaters,

P. Furjes, Z. Vizvary, M. Adam, A. Morrissey, C. Ducso, I. Barsony, pp.98-103. Abstract.

Silicon membranes fabrication by wet anisotropic etching,

R. Iosub, C. Moldovan, M. Modreanu, pp.104-111. Abstract.

Advanced micromachining processes for micro-opto-electromechanical components and devices,

G. D'Arrigo, S. Coffa, C. Spinella, pp.112-118. Abstract.

Micromachining of a silicon multichannel microprobe for neural electrical activity recording,

C. Moldovan, V. Ilian, G. Constantin, R. Iosub, M. Modreanu, I.Dinoiu, B. Firtat, C. Voitincu, pp.119-124. Abstract.

Design, fabrication and modeling of solid propellant microrocket-application to micropropulsion,

C. Rossi, S. Orieux, B. Larangot, T. Do Conto, D. Esteve, pp.125-133. Abstract.

Miniature transducers based on Si whisker joints,

S.S. Varshava, I.P. Ostrovskii, pp.134-136. Abstract.

Void formation and electromigration in sputtered Ag lines with different encapsulations,

M. Hauder, J. Gstottner, W. Hansch, D. Schmitt-Landsiedel, pp.137-143. Abstract.

Modern optical measurement station for micro-materials and micro-elements studies,

M. Kujawinska, pp.144-153. Abstract.

IR-spectra of waveguides in LiNbO3 obtained by using different melts,

M.K. Kuneva, S.H. Tonchev, M. Sendova-Vasileva, D. Dimova-Malinovska, P.A. Atanasov, pp.154-159. Abstract.

Microstructural information from optical properties of LPCVD silicon films annealed at low temperature,

M. Gartner, M. Modreanu, C. Cobianu, R. Gavrila, M. Danila, pp.160-164. Abstract.

Micro- and nanomaterials characterization by image correlation methods,

D. Vogel, A. Gollhardt, B. Michel, pp.165-171. Abstract.

Characterization of mechanical and thermal properties of thin Cu foils and wires,

B. Weiss, V. Groger, G. Khatibi, A. Kotas, P. Zimprich, R. Stickler, B. Zagar. pp.172-182. Abstract.

Generalized fracture mechanical integral concept JG and its application in microelectronic packaging technology,

H. B. Ghavifekr, B. Michel, pp.183-187. Abstract.

Characterisation of constitutive behaviour of SnAg, SnAgCu and SnPb solder in flip chip joints,

S. Wiese, F. Feustel, E. Meusel, pp.188-193. Abstract.

Creep behaviour of lead free and lead containing solder materials at high homologous temperatures with regard to small solder volumes,

J. Villain, O.S. Brueller, T. Qasim, pp.194-197. Abstract.

Fracture mechanics of bonding interface: a cohesive zone model,

K. Kishimoto, M. Omiya, W. Yang, pp.198-206. Abstract.

The effects of deposition and annealing conditions on crystallographic properties of sputtered barium ferrite thick films,

B. Bayard, J.P. Chatelon, M. Le Berre, H. Joisten, J.J. Rousseau, Barbier, pp.207-212. Abstract.

Fatigue study of SrBi"2Ta"2O"9 thin films processed in forming gas,

T. Yu, D.-S. Wang, D. Wu, A.-D. Li, Y.-D. Xia, A. Hu, Z.-G. Liu, N.-B. Ming, pp.213-215. Abstract.

Mechanical characterization and reliability study of bistable SiO2/Si membranes for microfluidic applications, C. Malhaire, A. Didiergeorges, M. Bouchardy, D. Barbier, pp.216-219. Abstract.

Role of the i layer surface properties on the performance of a-Si:H Schottky barrier photodiodes,

H. Aguas, E. Fortunato, R. Martins, pp. 220-223. Abstract.

Conference Calendar. pp. 224-225.

List of conferences, pp.226-227.