Title: Smart Sensors and MEMS

Author: Sergey Y. Yurish (Editor), Maria Teresa S.R. Gomes (Editor)

Publisher: Springer Verlag

Hardcover: 480 pages

Pubdate: January, 2005

ISBN: 1402029276

Price: $ 89.95 (paperback), $ 199.00 (hardcover)

Abstract

The chapter gives an overview of industrial types of smart sensors (temperature, pressure, rotation speed, optical, humidity, gas, chemical, acceleration, biosensors etc.) and contains quasi-digital, smart sensors and MEMS definitions. Digital and quasi-digital (frequency and duty-cycle output) sensors and transducers are considered. The obvious tendency of sensors accuracy increasing up to 0.01 % or better and wide conversion frequency range from several hundredth parts of Hz up to several MHz are observed. Main advantages of frequency-time domain signal as informative parameters for modern smart sensors are described.

Keywords: smart sensor; MEMS; frequency-time domain; digital sensor; quasi-digital sensor; transducer; integrated sensor; intelligent sensor; parametric sensor; self-generating sensor; modulating sensor, biosensor

Sergey Y. Yurish – NATO ASI Co-director, Dr., Associate Professor, IFSA Vice President, National University Lviv Polytechnic, Ukraine, 79013 Lviv, Bandera str., 12

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