Title: Smart Sensors and MEMS

Author: Sergey Y. Yurish (Editor), Maria Teresa S.R. Gomes (Editor)

Publisher: Springer Verlag

Hardcover: 480 pages

Pubdate: January, 2005

ISBN: 1402029276

Price: $ 89.95 (paperback), $ 199.00 (hardcover)

Abstract

The recent developments in micro-mechanical or micro-electro -mechanical (MEMS) systems have enabled the use of new transduction modes that involve mechanical energy and are based primarily on mechanical phenomena. As a result, an innovative family of chemical and biological sensors has emerged. In this work we discuss the recent advances in cantilever transducers. While MEMS represents a diverse family of designs, devices with simple cantilever configurations are especially attractive as transducers for chemical and biological sensors. We discuss four important aspects of cantilever transducers, which include operation principles and models, figures of merit, and applications. We also provide a brief analysis of historical predecessors of the modern cantilever sensors.

Keywords: microcantilever, MEMS, micromechanical, resonance, deformation, transducer, stress, chemical sensor, biosensor, analyte, response mechanism, noise, thermo-mechanical, figures of merit.

Panos Datskos, Professor, Dr., Oak Ridge National Laboratory, Engineering Science and Technology Division, Bldg. 4500S, Rm H-160, MS 6141,Bethel Valley Rd., MS6141, P.O. Box 2008, Oak Ridge, TN 37831-6141, USA, E-mail: pgd@ornl.gov