Title: Smart Sensors and MEMS

Author: Sergey Y. Yurish (Editor), Maria Teresa S.R. Gomes (Editor)

Publisher: Springer Verlag

Hardcover: 480 pages

Pubdate: January, 2005

ISBN: 1402029276

Price: $ 89.95 (paperback), $ 199.00 (hardcover)

Abstract

The operating principles, design and manufacturing in thick-film technology (TFT) of sensors based on the piezoelectric and pyroelectric properties of lead zirconate titanate (PZT) thick films are described. In particular, the attention is focused on acoustic-wave piezoelectric sensors for physical and chemical quantities, and on pyroelectric sensors and arrays for light spot position measurement.

Keywords:  piezoelectric sensor, pyroelectric sensor, acoustic-wave sensor, sensor array, thick-film technology, lead zirconate titanate (PZT).

Vittorio Ferrari, Professor, Dr., Dip. Elettronica per l'Automazione, Facoltá di Ingegneria - Universitá di Brescia, Via Branze, 38 - I25123 Brescia – Italy. E-mail: vittorio.ferrari@unibs.it