Title: Smart Sensors and MEMS

Author: Sergey Y. Yurish (Editor), Maria Teresa S.R. Gomes (Editor)

Publisher: Springer Verlag

Hardcover: 480 pages

Pubdate: January, 2005

ISBN: 1402029276

Price: $ 89.95 (paperback), $ 199.00 (hardcover)

Abstract

The fabrication technology for Si-MEMS devices is mainly derived from the processes used for the realization of microelectronic devices. However, due to the specific demands for MEMS, there are special processes needed for MEMS devices. In this chapter, after reviewing general aspects of microtechnology some of the specific MEMS-processes will be discussed, e.g. bulk-micromachining, surface micromachining, DRIE and SOI-technology.

Keywords: MEMS, microsystem technology, Si-technology, Si-micromachining

Ulrich Mescheder, Professor, Dr., FH Furtwangen - University of Applied Sciences, Furtwangen, Department Computer and Electrical Engineering,, Robert-Gerwig-Platz 1, D-78120 Furtwangen, Germany, E-mail: mes@fh-furtwangen.de