MEMS

  Title: MEMS

  Author: Nitaigour Premachand Mahalik

  Publisher: McGraw-Hill Education

  Paperback: 500 pages

  Pubdate: 9 January 2009

  ISBN: 0070142947

Book Description

MEMS are small and integrated devices, which combine electronics, electrical as well as mechanical elements to meet the control related functional requirements. This book synergistically covers the aspects of multidisciplinary subjects by providing the proof-of-principle, concepts, design, development and applications of MEMS.

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