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Vol. 142, No. 7, July 2012, pp. 143-149




TiO2 Thin Film Capacitive Humidity Sensor Based on Sol-gel Technique


* Manju Pandey, ** Debdulal Saha, * Kamalendu Sengupta, S. S. Islam, *M. P. Singh

*Nano-Sensor Research Laboratory, F/O Engineering and Technology, Jamia Millia Islamia (Central University), New Delhi, India

** Sensors and Actuators Division, Central Glass & Ceramic Research Institute, 196 Raja S. C. Mullick Road, Kolkata-700032, India

E-mail: kamalendusengupta@yahoo.co.in, manju.pandey22@yahoo.com


Received: 5 May 2012   /Accepted: 23 July 2012   /Published: 31 July 2012

Digital Sensors and Sensor Sysstems


Abstract: A new approach for humidity sensing is reported. The sensor is based on ordered nanoporous titanium dioxide (TiO2) thin film over silver palladium coated nonporous alumina substrate. Porous TiO2 thin films were prepared by emulsification-gelation technology using hydrolysis and reflux process. Coating optimization was achieved and hydrophilicity of the TiO2 thin film was determined. SEM results revealed that pores were distributed uniformly throughout the sample, which enhanced the adsorption of water molecule over the film. Raman study clearly confirmed the anatase and rutile phase of TiO2 thin film. Electrical sensing response was calculated using impedance measurement. It was found that at an optimized coating thickness the sensitivity of our humidity sensor was suitable for commercial applications.


Keywords: Humidity sensor, TiO2, Thin films, Sol-Gel, Raman spectroscopy



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