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Vol. 144, No. 9, September 2012, pp. 45-61




Effect of Firing Temperature on the Micro Structural Parameters of Synthesized Zinc Oxide Thick Film Resistors Deposited by Screen Printing Method

a* Ratan Y. BORSE, b Vaishali. T. SALUNKE and c Jalinder AMBEKAR

a,b Thin and Thick Film Laboratory, Department of Electronic Science, M. S. G. College, Malegaon Camp - 423105 (Nasik), India

c Centre for Materials for Electronics Technology (CMET) Pune, India

Tel.: (02554) 252077, fax: (02554) 251705

a* E-mail: ratanborse@yahoo.co.in



Received:   26 June 2012   /Accepted: 21 September 2012   /Published: 28 September 2012

Digital Sensors and Sensor Sysstems


Abstract: Zinc-oxide (ZnO) powder was prepared by synthesis of zinc nitrate using self propagation solution combustion method in air with the purpose of modifying the powders physico-chemical properties. Textured ZnO thick film resistors (TFRs) have been deposited on alumina using standard screen printing method. The films were fired at 500, 600 and 700 C for 2h firing cycle in air. The influence of firing temperature on the structural and morphological properties of the TFRs was investigated. X-ray diffraction (XRD) studies indicate the formation of polycrystalline hexagonal (wurtzite) crystal structure with preferential orientation along (101) plane. X-ray line broadening technique is adopted to study the effect of firing temperature on microstructural parameters such as interplaner spacing, average grain size, microstrain, dislocation density due to microstrain, stacking fault probability and texture coefficient. The dependence of these values on the firing temperature was established, which enabled analysis of the evolution of the defect structure of zinc-oxide TFRs during the firing. Scanning electron microscopic (SEM) images of the films fired at 500 and 600 oC are more porous as compared to TFR fired at 700 oC. The grain size is little bit larger as the increase of firing temperature although the increase is not significant.


Keywords: ZnO, TFRs, Firing temperature, SEM, Texture coefficient



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