bullet Sensors & Transducers Journal

    (ISSN 1726- 5479)


2008 e-Impact Factor

25 Top Downloaded Articles

Best Selling Articles 2012

Journal Subscription 2013

Editorial Calendar 2013

Submit an Article

Editorial Board

Current Issue

S&T journal's cover

Sensors & Transducers Journal 2011

Sensors & Transducers Journal 2010

Sensors & Transducers Journal 2009

Sensors & Transducers Journal 2008

Sensors & Transducers Journal 2007

2000-2002 S&T e-Digest Contents

2003 S&T e-Digest Contents

2004 S&T e-Digest Contents

2005 S&T e-Digest Contents

2006 S&T e-Digest Contents


Best Articles 2011




Vol. 157, Issue 10, October 2013, pp. 392-399




Resonant Biaxial Nanoprobe Utilized for Non-Contact Surface Measurements
Boris Goj, Lothar Dressler, Martin Hoffmann

Chair for Micromechanical Systems, IMN MacroNano®, Ilmenau University of Technology, Max-Planck-Ring 12, 98693 Ilmenau, Germany
Tel.: +49-3677-691295, fax: +49-3677-691840
E-mail: boris.goj@tu-ilmenau.de


Received: 15 August 2013   /Accepted: 25 September 2013   /Published: 31 October 2013

Digital Sensors and Sensor Sysstems


Abstract: In this work a non-contact biaxial nanoprobe for surface profile scans of macroscopic objects with 150 nm accuracy is presented. The biaxial nanoprobe oscillates in two directions to overcome the challenges of sticking in contact mode. Two electrostatic actuators drive the nanoprobe while two electrostatic sensors measure the position of the tip ball. The contact behavior between the tip ball and the specimen is determined by the contact stiffness and the contact damping. Dependent on the dominating effect the nanoprobeoperatesat semi- or non-contact mode, respectively. The aims of this paper are the investigation of the contact behavior, the proof of the independent evaluation of the two axes and the check if sticking is safely avoided.


Keywords: Biaxial nanoprobe, Non-contact, Electrostatic actuator, Silicon micromachining, Oscillating.


Acrobat reader logo Click <here> or title of paper to download the full pages article in pdf format



Download <here> the Library Journal Recommendation Form



Read more about Nanosensors






1999 - 2018 Copyright ©, International Frequency Sensor Association (IFSA). All Rights Reserved.

Home - News - Links - Archives - Tools - Voltage-to-Frequency Converters - Standardization - Patents - Marketplace - Projects - Wish List - e-Shop - Sensor Jobs - Membership - Videos - Publishing - Site Map - Subscribe - Search

 Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Submit Press Release - Submit White Paper - Testimonies - Twitter - Facebook - LinkedIn